Microhotplates for metal oxide semiconductor gas sensor applications—Towards the CMOS-MEMS monolithic approach
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …
E-nose based on a high-integrated and low-power metal oxide gas sensor array
Z Li, J Yu, D Dong, G Yao, G Wei, A He, H Wu… - Sensors and Actuators B …, 2023 - Elsevier
To improve the poor selectivity of a semiconductor gas-sensor system, an array of sensors
can be utilized. However, this increases the system's size and power consumption. To …
can be utilized. However, this increases the system's size and power consumption. To …
Two operating modes of palladium film hydrogen sensor based on suspended micro hotplate
Q Liu, J Yao, Y Wu, Y Wang, G Ding - International Journal of Hydrogen …, 2019 - Elsevier
Palladium film hydrogen sensor based on suspended micro hotplate has been fabricated to
operate at elevated temperature with low power consumption. Below 150° C, the response …
operate at elevated temperature with low power consumption. Below 150° C, the response …
ALD nano-catalyst for micro-calorimetric detection of hydrocarbons
F Bíró, C Dücső, GZ Radnóczi, Z Baji, M Takács… - Sensors and Actuators B …, 2017 - Elsevier
Explosion alarm in atmospheric condition requires detection of hydrocarbons at the level of
volume percent concentration range. This is best achieved by the combustion type detection …
volume percent concentration range. This is best achieved by the combustion type detection …
Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
Q Liu, G Ding, Y Wang, J Yao - Micromachines, 2018 - mdpi.com
In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam
structure and reticular structure are designed. These designs have a reliable mechanical …
structure and reticular structure are designed. These designs have a reliable mechanical …
The critical impact of temperature gradients on Pt filament failure
This work established the correlation between the location of temperature gradients and the
positions where breakdown is observed on different Pt filament layouts in cantilever and full …
positions where breakdown is observed on different Pt filament layouts in cantilever and full …
[PDF][PDF] Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors.
S Peng, D Xie, J Wang, M Chen… - Sensors & Materials, 2018 - pdfs.semanticscholar.org
A gas sensor with low power consumption was manufactured using a suspended
microhotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles …
microhotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles …
The Role of Phase Changes in TiO2/Pt/TiO2 Filaments
This work analyses the role of phase changes in TiO 2/Pt/TiO 2 layer stacks for micro-heater
application regarding their stability and reliable operation. The polycrystalline Pt layer …
application regarding their stability and reliable operation. The polycrystalline Pt layer …
Fabrication of micromachined hotplates by combining the PolyMUMPs technology with self-aligned post-processing steps
YC Cho, MY Elsayed… - Journal of Micromechanics …, 2020 - iopscience.iop.org
In this article, we propose a process to fabricate micromachined hotplates, by leveraging the
multiuser MEMS process known as PolyMUMPs from MEMSCAP. The PolyMUMPs …
multiuser MEMS process known as PolyMUMPs from MEMSCAP. The PolyMUMPs …
Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications
MR Venkatesh, B El Mansouri, J Wei… - … and Multi-Physics …, 2016 - ieeexplore.ieee.org
In this paper, we present electro-thermal analysis and design of a combined MEMS micro
hotplate and interdigitated-capacitance impedance sensor for gas sensing application using …
hotplate and interdigitated-capacitance impedance sensor for gas sensing application using …