The recent development of the Internet of Things (IoT) in healthcare and indoor air quality
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …

To improve the poor selectivity of a semiconductor gas-sensor system, an array of sensors
can be utilized. However, this increases the system's size and power consumption. To …

Palladium film hydrogen sensor based on suspended micro hotplate has been fabricated to
operate at elevated temperature with low power consumption. Below 150° C, the response …

Explosion alarm in atmospheric condition requires detection of hydrocarbons at the level of
volume percent concentration range. This is best achieved by the combustion type detection …

In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam
structure and reticular structure are designed. These designs have a reliable mechanical …

This work established the correlation between the location of temperature gradients and the
positions where breakdown is observed on different Pt filament layouts in cantilever and full …

A gas sensor with low power consumption was manufactured using a suspended
microhotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles …

This work analyses the role of phase changes in TiO 2/Pt/TiO 2 layer stacks for micro-heater
application regarding their stability and reliable operation. The polycrystalline Pt layer …

In this article, we propose a process to fabricate micromachined hotplates, by leveraging the
multiuser MEMS process known as PolyMUMPs from MEMSCAP. The PolyMUMPs …

In this paper, we present electro-thermal analysis and design of a combined MEMS micro
hotplate and interdigitated-capacitance impedance sensor for gas sensing application using …