Design and fabrication of millimeter-wave frequency-tunable metamaterial absorber using MEMS cantilever actuators
In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable
metamaterial absorber for millimeter-wave application was demonstrated. To achieve the …
metamaterial absorber for millimeter-wave application was demonstrated. To achieve the …
[HTML][HTML] A novel design for low insertion loss, multi-band RF-MEMS switch with low pull-in voltage
This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, float metal concept is utilized to reduce the RF overlap area between the movable …
design, float metal concept is utilized to reduce the RF overlap area between the movable …
Controlling stress and stress gradient during the release process in gold suspended micro-structures
V Mulloni, F Giacomozzi, B Margesin - Sensors and Actuators A: Physical, 2010 - Elsevier
In this paper it will be demonstrated that the conditions of the final release process in oxygen
plasma strongly influence the shape of suspended gold micro-structures. Both single …
plasma strongly influence the shape of suspended gold micro-structures. Both single …
Modeling and experimental verification of thermally induced residual stress in RF-MEMS
A Somà, MM Saleem - Journal of Micromechanics and …, 2015 - iopscience.iop.org
Electrostatically actuated radio frequency microelectromechanical systems (RF-MEMS)
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
Modeling and measurement of thermal–mechanical-stress-creep effect for RF MEMS switch up to 200 C
High-temperature processes, such as packaging and annealing, are challenges for Radio-
Frequency Micro-Electro-Mechanical-Systems (RF MEMS) structures, which could lead to …
Frequency Micro-Electro-Mechanical-Systems (RF MEMS) structures, which could lead to …
A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry
V Mulloni, S Colpo, A Faes… - … of Micromechanics and …, 2013 - iopscience.iop.org
This paper presents an analytical method to calculate residual stress and Young's modulus
in clamped–clamped beams. These types of structures are a typical building block of many …
in clamped–clamped beams. These types of structures are a typical building block of many …
High-power electro-mechanical behavior of a capacitive microwave power sensor with warped cantilever beam
J Li, X Liao - Solid-State Electronics, 2020 - Elsevier
In this paper, high-power up to 4000 mW electro-mechanical behavior of a capacitive micro-
electromechanical systems (MEMS) microwave power sensor using cantilever beam is …
electromechanical systems (MEMS) microwave power sensor using cantilever beam is …
Fabrication of freestanding metallic Ni-Mo-W microcantilever beams with high dimensional stability
Recent studies have elucidated a promising balance of physical and mechanical properties
of sputter deposited nickel-molybdenum-tungsten (Ni-Mo-W) films that have a unique …
of sputter deposited nickel-molybdenum-tungsten (Ni-Mo-W) films that have a unique …
Planarization optimization of RF-MEMS switches with a gold membrane
In this paper, a new process is analysed to improve the contact area between a metallic
bridge and a signal line of a capacitive switch thanks to a better membrane planarization …
bridge and a signal line of a capacitive switch thanks to a better membrane planarization …
Strengthening of micro-cantilever by Au/Ti bi-layered structure evaluated by micro-bending test toward MEMS devices
This study reports mechanical property enhancement observed in micro-cantilevers
composed of Au/Ti bi-layered structure evaluated by micro-bending test. A layer of gold film …
composed of Au/Ti bi-layered structure evaluated by micro-bending test. A layer of gold film …