Highly efficient and atomic scale polishing of GaN via plasma-based atom-selective etching

L Zhang, B Wu, Y Zhang, H Deng - Applied Surface Science, 2023 - Elsevier
Plasma-based atom-selective etching (PASE) of GaN is conducted to realize the highly
efficient planarization of the GaN surface. Inductively coupled plasma with high temperature …

[HTML][HTML] Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

E Gacka, P Kunicki, P Łysik, K Gajewski… - Ultramicroscopy, 2023 - Elsevier
High-resolution scanning probe microscopy (SPM) is a fundamental and efficient technology
for surface characterization of modern materials at the subnanometre scale. The bottleneck …

[HTML][HTML] Effect of oxidation temperature on physical properties of polycrystalline β-Ga2O3 grown by thermal oxidation of GaN in O2 ambient from 900 to 1400° C

Q Shi, S Wei, F Shi, T Chen, M Zhao, M Lee - Journal of Materials Research …, 2024 - Elsevier
This study aimed to investigate the effect of oxidation temperature on the physical properties
of β-Ga 2 O 3 grown by thermal oxidation of GaN in the O 2 ambient at high oxidation …

[HTML][HTML] Growth of p-type GaN–The role of oxygen in activation of Mg-doping

A Kumar, M Berg, Q Wang, M Salter… - Power Electronic Devices …, 2023 - Elsevier
The effects of N 2 and O 2: N 2 (1: 1) as ambient gases during activation annealing of Mg as
p-type doping of GaN have been investigated. The purpose was to understand the …

New oxide structures clearing up the origin of two-dimensional electron gas in AlGaN/GaN heterostructures

Z Wang, W Yi, Y Cao, M Miao, J Liu - The Journal of Chemical Physics, 2023 - pubs.aip.org
Control over the two-dimensional electron gas (2DEG) in AlGaN/GaN heterostructures is
crucial for their practical applications in current semiconducting devices. However, the oxide …

Acceptor activation of Mg-doped GaN—Effects of N2/O2 vs N2 as ambient gas during annealing

A Kumar, M Berg, Q Wang, J Uzuhashi… - Journal of Applied …, 2023 - pubs.aip.org
Here, we investigate the effects of O 2: N 2 (1: 1) as ambient gas as compared with pure N 2
during activation annealing of Mg as p-type doping in GaN layers grown by MOCVD. The …