This review provides a comprehensive survey of noise research in MEMS. Some
background on noise and on MEMS is provided. We review noise production mechanisms …

In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

The monitoring of acceleration is essential for a variety of applications ranging from inertial
navigation to consumer electronics,. Typical accelerometer operation involves the sensitive …

Electrostatic, comb-drive actuators have been designed for applications requiring
displacements of up to 150 μm in less than 1 ms. A nonlinear model of the actuator relates …

High-precision miniature accelerometers based on electron tunneling transducers have
been successfully fabricated using bulk-silicon micromachining process. This process has …

声矢量传感器由传统的无指向性声压传感器和偶极子指向性质点振速传感器复合而成,
可以同步共点测量声场中一点处的声压和质点振速若干正交分量, 由此得到的幅度和相位信息为 …

This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is
fabricated on a single-silicon wafer using a combined surface and bulk fabrication process …

A high-resolution accelerometer with a bulk-micromachined silicon proof mass and an
interferometric position sensor was developed for measuring vibratory accelerations. The …

In this paper, we review the high-resolution, micromachined accelerometers by enunciating
the development of their mechanical components, the electronic circuitry and the …

Abstract Fixed-wing Micro-Aerial Vehicles (MAVs) need effective sensors that can rapidly
detect turbulence induced motion perturbations. Current MAV attitude control systems rely …