A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray

P Szypryt, N Nakamura, DT Becker… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer
implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a …

Design of a 3000-pixel transition-edge sensor X-ray spectrometer for microcircuit tomography

P Szypryt, DA Bennett, WJ Boone… - IEEE Transactions …, 2021 - ieeexplore.ieee.org
Feature sizes in integrated circuits have decreased substantially over time, and it has
become increasingly difficult to three-dimensionally image these complex circuits after …

Hardware deprocessing using voltage imaging for hardware assurance

MM Tehranipoor, N Asadi-Zanjani, OP Paradis… - US Patent …, 2023 - Google Patents
2021-02-22 Assigned to UNIVERSITY OF FLORIDA RESEARCH FOUNDATION,
INCORPORATED reassignment UNIVERSITY OF FLORIDA RESEARCH FOUNDATION …

High-resolution x-ray spectroscopy surface material analysis

Y Zur - US Patent 11,404,244, 2022 - Google Patents
A method of performing x-ray spectroscopy surface material analysis of a region of interest of
a sample with an evaluation system that includes a scanning electron microscope (SEM) …

Semiconductor package authentication feature

S Dankowski, T Gutheit, B Lippmann - US Patent 11,063,000, 2021 - Google Patents
A carrier having one or more conductive terminals is provided. A semiconductor die is
mounted on the carrier. The semiconductor die is electrically connected to the one or more …

Nanofabricated structures for sub-beam resolution and spectral enhancement in tomographic imaging

EM Lavely, AV Masurkar, TJ Stark - US Patent 11,340,179, 2022 - Google Patents
Techniques are provided for tomographic imaging with sub-beam resolution and spectral
enhancement. A system implementing the techniques according to an embodiment includes …

X-ray detector and x-ray measurement device using the same

K Hozawa, T Takahama - US Patent App. 16/197,444, 2019 - Google Patents
An X-ray detector and an X-ray measurement device capable of improving detection
efficiency of an X-ray while maintaining high resolution are provided. An X-ray detector …

X-ray imaging in cross-section using un-cut lamella with background material

Y Zur, A Litman - US Patent 11,501,951, 2022 - Google Patents
US11501951B1 - X-ray imaging in cross-section using un-cut lamella with background material
- Google Patents US11501951B1 - X-ray imaging in cross-section using un-cut lamella with …

Pattern measurement system and pattern measurement method

W Sun, T Yamamoto, Y Goto - US Patent App. 17/609,198, 2022 - Google Patents
In order to measure a 3D profile of a pattern formed on a sample obtained by stacking a
plurality of different materials, for each of materials constituting the pattern, an attenuation …

Sample mounting system for an X-ray analysis apparatus

J Boksem, D Beckers - US Patent 11,927,550, 2024 - Google Patents
The sample mounting system comprises a sample holder and a sample stage having a
platform for supporting the sample holder. The sample can be fixed to the sample holder by …