Progress of optomechanical micro/nano sensors: a review

X Liu, W Liu, Z Ren, Y Ma, B Dong… - International Journal of …, 2021 - Taylor & Francis
Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …

Trends in nanophotonics‐enabled optofluidic biosensors

J Wang, SA Maier, A Tittl - Advanced Optical Materials, 2022 - Wiley Online Library
Optofluidic sensors integrate photonics with micro/nanofluidics to realize compact devices
for the label‐free detection of molecules and the real‐time monitoring of dynamic surface …

A self-standing three-dimensional covalent organic framework film

Y Yang, Y Chen, F Izquierdo-Ruiz, C Schäfer… - Nature …, 2023 - nature.com
Covalent crystals such as diamonds are a class of fascinating materials that are challenging
to fabricate in the form of thin films. This is because spatial kinetic control of bond formation …

Nanometer-scale heterogeneous interfacial sapphire wafer bonding for enabling plasmonic-enhanced nanofluidic mid-infrared spectroscopy

J Xu, Z Ren, B Dong, X Liu, C Wang, Y Tian, C Lee - ACS nano, 2020 - ACS Publications
As one of the most effective surface-enhanced infrared absorption (SEIRA) techniques,
metal–insulator–metal structured metamaterial perfect absorbers possess an ultrahigh …

Heterogeneous wafer bonding technology and thin-film transfer technology-enabling platform for the next generation applications beyond 5G

Z Ren, J Xu, X Le, C Lee - Micromachines, 2021 - mdpi.com
Wafer bonding technology is one of the most effective methods for high-quality thin-film
transfer onto different substrates combined with ion implantation processes, laser irradiation …

Plasma-activated silicon–glass high-strength multistep bonding for low-temperature vacuum packaging

M Yu, L Zhao, Y Wang, Y Xia, Y Ma, Y Wang… - Chemical Engineering …, 2023 - Elsevier
Si-glass bonding is one of the most crucial vacuum packaging methods in semiconductor
devices; however, high temperatures (> 300° C) are required to achieve a high bonding …

Oxygen incorporation-induced SERS enhancement in silver nanoparticle-decorated ZnO nanowires

A Fularz, S Almohammed, JH Rice - ACS Applied Nano Materials, 2020 - ACS Publications
Surface-enhanced Raman spectroscopy (SERS) is a sensitive and nondestructive technique
used for the detection of molecules, traditionally applied on noble-metal or semiconductor …

Laser-assisted slow tool servo diamond turning of single-crystal silicon for fabricating micro-lens arrays

H Du, D Zhao, C Liu, H Chen, S To - Journal of Manufacturing Processes, 2024 - Elsevier
Single-crystal silicon is extensively applied in electronic devices, but the traditional
ultraprecision diamond turning methods easily cause worse surface quality or surface …

A modular fabrication process for thin-film lithium niobate modulators with silicon photonics

V Mere, F Valdez, X Wang… - Journal of Physics …, 2022 - iopscience.iop.org
We report advancements in the fabrication of electro-optic Mach-Zehnder modulators made
by bonding an unetched thin film of lithium niobate (LN) to a second chip with rib …

Occurrence modes of water in gasification fine slag filter cake and drying behavior analysis——A case study

F Guo, H Liu, Y Guo, Y Zhang, J Li, X Zhao… - Journal of Environmental …, 2021 - Elsevier
Coal gasification fine slag is one of the major industrial wastes produced from coal
gasification technology and its landfill disposal of the high-moisture product has brought …