This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …

This paper presents results on high lifetime RF microelectromechanical (RF-MEMS)
dielectricless capacitive switches. Using air gap variation only, these RF MEMS capacitive …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

The paper investigates the dependence of charging process on the dielectric charging of
radiation induced defects in Si3N4 and SiO2 dielectric films, which are used in RF-MEMS …

A method that allows the investigation of discharge transport mechanism in dielectric films
used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is …

A new dynamical closed-loop method is proposed to control dielectric charging in capacitive
microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and …

Dielectric charging is a major reliability issue preventing commercialisation of RF MEMS
capacitive switches. To date two major modes have been considered as responsible for the …

Dielectric charging is one of the most challenging issues in RF-MEMS capacitive switches.
Dielectric less capacitive switch is shown with a measured on to off ratio of 9. The reliability …

The dielectric charging constitutes a major problem that still inhibits the commercial
application of RF MEMS capacitive switches. The effect arises from the presence of the …