[HTML][HTML] Electron-beam synthesis of dielectric coatings using forevacuum plasma electron sources

YG Yushkov, EM Oks, AV Tyunkov, DB Zolotukhin - Coatings, 2022 - mdpi.com
This is a review of current developments in the field of ion-plasma and beam methods of
synthesis of protective and functional dielectric coatings. We give rationales for …

[HTML][HTML] Dielectric coating deposition regimes during electron-beam evaporation of ceramics in the fore-vacuum pressure range

YG Yushkov, EM Oks, AV Tyunkov, DB Zolotukhin - Coatings, 2022 - mdpi.com
We present experimental results on the deposition of dielectric coatings on metal surfaces
by electron-beam evaporation of alumina ceramics in nitrogen and oxygen gas medium at …

Electron beam synthesis of silicon-carbon coatings in the forevacuum pressure range

DB Zolotukhin, AV Kazakov, EM Oks, AV Tyunkov… - Ceramics …, 2022 - Elsevier
We describe our investigations of the synthesis of silicon-carbon coatings obtained by
electron-beam evaporation of silicon carbide at forevacuum background gas pressure. The …

Different stages of electron-beam evaporation of ceramic target in medium vacuum

YG Yushkov, DB Zolotukhin, EM Oks… - Journal of Applied …, 2020 - pubs.aip.org
We present experimental results and numerical simulation of electron-beam heating,
melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum …

[HTML][HTML] Electron-beam synthesis and modification and properties of boron coatings on alloy surfaces

Y Yushkov, E Oks, A Kazakov, A Tyunkov, D Zolotukhin - Ceramics, 2022 - mdpi.com
In this study, fore-vacuum plasma electron beam sources were used to deposit a few micron-
thick boron coatings on A284 and ZrNb1 alloys and modify their surfaces. The coating …

[HTML][HTML] Electron-beam deposition of aluminum nitride and oxide ceramic coatings for microelectronic devices

YG Yushkov, EM Oks, AV Tyunkov, AY Yushenko… - Coatings, 2021 - mdpi.com
This work presents the results of the coating deposition by electron-beam evaporation of
aluminum nitride and aluminum oxide targets in nitrogen and oxygen atmospheres in the …

[HTML][HTML] Technological Principles of Complex Plasma-Beam Surface Treatment of Al2O3/TiC and SiAlON Ceramics

SN Grigoriev, MA Volosova, MA Lyakhovetsky… - … of Manufacturing and …, 2023 - mdpi.com
Thermomechanical action during high-performance diamond grinding of sintered cutting
Al2O3/TiC and SiAlON ceramics leads to increased defectiveness of the surface layer of the …

Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range

YG Yushkov, EM Oks, AV Tyunkov, DB Zolotukhin… - Ceramics …, 2020 - Elsevier
We present experimental results on the deposition of multi-layer heat-conducting coatings of
aluminum oxide and aluminum nitride on silicon substrates. We estimate the time …

Effects of gas pressure and bias potential on electron beam nitriding of titanium

AV Tyunkov, ЕМ Oks, YG Yushkov… - Journal of Applied …, 2022 - pubs.aip.org
We have studied the effects of gas pressure and bias potential on ion-plasma nitriding of
titanium in an electron beam-produced plasma generated in the forevacuum pressure …

Deposition of boron coatings on surfaces by electron-beam evaporation in forevacuum

YG Yushkov, SN Meisner, EM Oks, MG Ostapenko… - Ceramics …, 2023 - Elsevier
We implemented the boron coating deposition on the surface by means of electron-beam
evaporation of a crystalline pure boron target (99.9%) and ionization of its vapor at a …