Micro milling cutters or micro mills are unique and important micro tools for fabricating
miniaturised devices with sufficient geometrical and dimensional accuracy and machined …

Recently, mechanical micro-milling is one of the most promising micro-manufacturing
processes for productive and accurate complex-feature generation in various materials …

Brittle materials are widely used for producing important components in the industry of
optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials …

With its merits of excellent electrical properties and chemical durability, monocrystal silicon
has been widely used as the substrate material in photovoltaic and integrated circuit fields …

In advanced semiconductor packaging, silicon wafers are typically thinned to tens of microns
in thickness using ultra-precision grinding techniques, and the cutting speed greatly …

In this paper, molecular dynamics simulations are carried out to investigate the cutting
mechanism during the hybrid machining process combined the thermal and vibration …

In the present study, three different serpentine microchannels (Rectangular, U and V) of
rectangular cross-section with a channel span 24 mm were fabricated on a 0.525 mm thick …

Micro-milling through mechanical chip removal process has attracted much attention among
researchers due to its flexibility and productivity that allow an extensive application for …

High precision components made of hard and brittle materials are increasingly in demand in
many applications owing to the superior physical, mechanical, optical, or electronic …

In micro-milling, cutting forces generate non-negligible tool deflection, which has a
significant influence on the machining process and on workpiece accuracy. This paper …