To overcome the diffraction constraints of traditional optical lithography, the next generation
lithographies (NGLs) will utilize any one or more of EUV (extreme ultraviolet), X-ray, electron …

It is now widely accepted that the capacitive pressure sensor has potential benefits for future
robotic technologies, human-machine interface, artificial intelligence and health monitoring …

We demonstrate an application of a nanotube cantilever for zeptogram-level mass detection.
This letter presents a quantitative method to measure the oscillation amplitude of a nanotube …

Nanotweezers based on two carbon nanowires by means of localized chemical vapor
deposition using a focused ion beam (FIB-CVD) have been successfully demonstrated. The …

Sidewall morphology on three-dimensional (3D) tungsten structures grown with focused ion
beam-induced chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W (CO) …

Three-dimensional nanostructure fabrication has been demonstrated by 30keV Ga+ focused-
ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C14H10) source as …

We found that the lateral growth of a carbon nanopillar with electron beam-induced chemical
vapor deposition (EB-CVD) was mainly dominated by forward scattering of the electron …

We describe a novel three-dimensional fabrication technique using local electrophoresis
deposition assisted by laser trapping coupled with a spatial light modulator (SLM). In a …

In spite of the fact that the fabrication process of three-dimensional nano-structures is
complicated and expensive, it can be applied to a range of devices to increase their …

Focused electron beam induced depositions of nickel-containing materials obtained by
using bis (methylcyclopentadienyl) nickel (II) Ni (C 5 H 4 CH 3) 2 and tetrakis …