Micro/nanostructured surfaces have wide applications in optics, electronics, and aerospace.
However, the current fast tool servo (FTS) cannot satisfy the large demand for …

The parasitic motion of microgripper jaws affect clamping accuracy. The parallelogram
mechanism (PM) is often used as the last-stage of the multi-stage amplification mechanisms …

This paper proposes a new XY compliant parallel manipulator with large workspace and low
coupling motion by resorting to planar arrangement of multistage parallelogram …

Piezo-actuated compliant mechanisms are widely employed in precision positioning and
micro/nano manipulation due to their advantages of compact structure, high displacement …

In ultra-precision cutting, the inherent working frequency and positioning accuracy of
actuators are decisive. It is challenging to generate multi-scale cutting motions with high …

This paper presents dynamic modeling and robust vibration control for a high-speed macro–
micro gripping system comprised of an air-floating macro-positioning stage and a compliant …

In order to solve the problem of excessive displacement loss of the traditional micro-
displacement multi-stage amplification mechanism, a parallel-connection-driving concept is …

Precision manipulation tasks often require the use of compliant grippers to handle small and
delicate objects accurately. This paper proposes a novel low-cost underactuated compliant …

The tilt stage with high precision angular motions has emerged as one of the key enabling
components in many advanced engineering applications, such as adaptive optics, space …

Precise and stable operations in micromanipulation and microassembly require a high-
performance microgripper. To improve the predominant static and dynamic characteristics, a …