[HTML][HTML] Group-III nitride heteroepitaxial films approaching bulk-class quality
J Wang, N Xie, F Xu, L Zhang, J Lang, X Kang, Z Qin… - Nature Materials, 2023 - nature.com
III-nitride wide bandgap semiconductors are promising materials for modern optoelectronics
and electronics. Their application has progressed greatly thanks to the continuous quality …
and electronics. Their application has progressed greatly thanks to the continuous quality …
Epitaxial lateral overgrowth of GaN
B Beaumont, P Vennéguès, P Gibart - physica status solidi (b), 2001 - Wiley Online Library
Since there is no GaN bulk single crystal available, the whole technological development of
GaN based devices relies on heteroepitaxy. Numerous defects are generated in the …
GaN based devices relies on heteroepitaxy. Numerous defects are generated in the …
Reduction mechanisms for defect densities in GaN using one-or two-step epitaxial lateral overgrowth methods
P Vennéguès, B Beaumont, V Bousquet… - Journal of Applied …, 2000 - pubs.aip.org
A transmission electron microscopy study of the reduction mechanisms for defect densities
in epitaxial lateral overgrown (ELO) GaN films is presented. In the standard one step ELO …
in epitaxial lateral overgrown (ELO) GaN films is presented. In the standard one step ELO …
Continuous-flux MOVPE growth of position-controlled N-face GaN nanorods and embedded InGaN quantum wells
W Bergbauer, M Strassburg, C Kölper, N Linder… - …, 2010 - iopscience.iop.org
We demonstrate the fabrication of N-face GaN nanorods by metal organic vapour phase
epitaxy (MOVPE), using continuous-flux conditions. This is in contrast to other approaches …
epitaxy (MOVPE), using continuous-flux conditions. This is in contrast to other approaches …
In situ and ex situ evaluation of the film coalescence for GaN growth on GaN nucleation layers
S Figge, T Böttcher, S Einfeldt, D Hommel - Journal of Crystal Growth, 2000 - Elsevier
The microscopical evolution of GaN grown by metalorganic vapor-phase epitaxy is
investigated at all its stages, as nucleation layer growth, recrystallization, epitaxial …
investigated at all its stages, as nucleation layer growth, recrystallization, epitaxial …
Optimisation of AlN and GaN growth by metalorganic vapour-phase epitaxy (MOVPE) on Si (1 1 1)
H Lahreche, P Vennéguès, O Tottereau, M Laügt… - Journal of crystal …, 2000 - Elsevier
Single-crystal GaN thin films (500nm) were grown by low-pressure metal-organic vapour-
phase epitaxy (LP-MOVPE) on Si (111) substrates using AlN buffer layers. Depending on …
phase epitaxy (LP-MOVPE) on Si (111) substrates using AlN buffer layers. Depending on …
Pyramidal defects in metalorganic vapor phase epitaxial Mg doped GaN
P Vennéguès, M Benaissa, B Beaumont… - Applied Physics …, 2000 - pubs.aip.org
A transmission electron microscopy study of structural defects induced by the introduction of
Mg during the growth of metalorganic vapor phase epitaxy GaN is presented. These defects …
Mg during the growth of metalorganic vapor phase epitaxy GaN is presented. These defects …
Threading dislocation reduction in (0 0 01) GaN thin films using SiNx interlayers
The ability of in situ SiNx interlayers to lower the density of threading dislocations (TDs) has
been studied for the growth of c-plane (0001) GaN epilayers on sapphire by organometallic …
been studied for the growth of c-plane (0001) GaN epilayers on sapphire by organometallic …
Growth of high-quality GaN by low-pressure metal-organic vapour phase epitaxy (LP-MOVPE) from 3D islands and lateral overgrowth
H Lahreche, P Vennegues, B Beaumont… - Journal of Crystal …, 1999 - Elsevier
In this work, we present a novel growth method to obtain high structural quality GaN films on
sapphire by low-pressure metal-organic vapour phase epitaxy (LP-MOVPE). Our purpose is …
sapphire by low-pressure metal-organic vapour phase epitaxy (LP-MOVPE). Our purpose is …
Improvements in a-plane GaN crystal quality by a two-step growth process
JL Hollander, MJ Kappers, C McAleese… - Applied Physics …, 2008 - pubs.aip.org
Nonpolar (11 2 0) a-plane GaN films have been grown by metal-organic vapor deposition on
r-plane (1 1 02) sapphire. Lateral growth is favored using a low V: III ratio resulting in films …
r-plane (1 1 02) sapphire. Lateral growth is favored using a low V: III ratio resulting in films …