A great deal of work has been done to analyze the problem of robot move sequencing and
part scheduling in robotic flowshop cells. We examine the recent developments in this …

Fully automated production cells consisting of flexible machines and a material handling
robot have become commonplace in contemporary manufacturing systems. Much research …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity
time variation can make an originally feasible schedule infeasible. Thus, it is difficult to …

In this survey we review the current complexity status of basic cyclic scheduling models. We
start with the formulations of three fundamental cyclic scheduling problems, namely the …

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap
strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer …

With wafer residency time constraints for some wafer fabrication processes, such as low
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …

Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Because of wafer residency time constraints for cluster tools, it is very difficult to schedule
them. This paper addresses their scheduling issues and conducts their schedulability and …

Discusses a scheduling technique, for cluster tools, that addresses postprocessing
residency constraints and throughput requirements. The residency constraints impose a limit …