Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam
lithography, which makes 2D patterns down to a few nanometers, is one of the fundamental …

This focused review aims to reveal and illustrate some unique features of processes
triggered by high-density energy applied to liquids and gas-liquid interfaces and to highlight …

Enabling memristive, neuromorphic, and quantum-based computing as well as efficient
mainstream energy storage and conversion technologies requires the next generation of …

Advancement of focused electron beam-induced deposition (FEBID) as a versatile direct-
write additive nanoscale fabrication technique has been inhibited by poor throughput …

Focused electron beam-induced deposition using the heteroleptic complex (η3-C3H5) Ru
(CO) 3Br as a precursor resulted in deposition of material with Ru content of 23 at …

Following Moores law, the performance of devices should double within a two‐year span,
which can either be done by reducing the size of the individual components or adapting the …

Additive microfabrication processes based on localized electroplating enable the one‐step
deposition of micro‐scale metal structures with outstanding performance, eg, high electrical …

The advancement of liquid phase electron/ion beam induced deposition has enabled an
effective direct-write approach for functional nanostructure synthesis with the possibility of …

Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct
writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution …

Electron-beam induced deposition of high-purity copper nanostructures is desirable for
nanoscale rapid prototyping, interconnection of chemically synthesized structures, and …