Contact over active gate structures with etch stop layers for advanced integrated circuit structure fabrication
A Madhavan, NJ Kybert, MK Haran… - US Patent 11,393,754, 2022 - Google Patents
Contact over active gate (COAG) structures with etch stop layers, and methods of fabricating
contact over active gate (COAG) structures using etch stop layers, are described. In an …
contact over active gate (COAG) structures using etch stop layers, are described. In an …