Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

Due to various sources of nonlinearities, micro/nano-electro-mechanical-system
(MEMS/NEMS) resonators present highly nonlinear behaviors including softening-or …

This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

We demonstrate the application of the internal model principle in tracking a sequential
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …

We present a microelectromechanical system (MEMS)-based closed-loop force sensor,
capable of measuring bidirectional forces along one axis of motion. The device comprises …

The ability to investigate mechanical and material properties of micro-and nano-sized
devices and surfaces is of significance in many fields of science and technology. Scanning …

This paper presents the first experimental implementation of a XY differential piezo-driven
stage in closed loop for tracking reference signals at the kHz with nanometer resolution by …

The capability of producing highly-accurate mechanical motion with nanometer or sub-
nanometer resolution is the defining characteristic of nanopositioners. With this motion …

The advent of nanotechnology was marked when Richard Feynman introduced the
immense possibilities of miniaturization in his now famous talk There's Plenty of Room at the …