The term “plasma actuator” has been a part of the fluid dynamics flow control vernacular for
more than a decade. A particular type of plasma actuator that has gained wide use is based …

Fluid, particle-in-cell and hybrid models are the numerical simulation techniques commonly
used for simulating low-temperature plasma discharges. Despite the complexity of plasma …

Low-temperature radio frequency plasmas are essential in various sectors of advanced
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …

Fluid models of gas discharges require the input of transport coefficients and rate
coefficients that depend on the electron energy distribution function. Such coefficients are …

In order to use particle-in-cell (PIC) simulation codes for modeling collisional plasmas and
self-sustained discharges, it is necessary to add interactions between charged and neutral …

Without plasma processing techniques, recent advances in microelectronics fabrication
would not have been possible. But beyond simply enabling new capabilities, plasma-based …

The first publication of its kind in the field, this book describes comprehensively and
systematically radio-frequency (rf) capacitive gas discharges of intermediate and low …

A one‐dimensional fluid simulation of a 13.56 MHz argon glow discharge including
metastable species was performed as an example of a coupled glow‐discharge/neutral …

A self-consistent fluid model of radio-frequency glow discharges has been used to analyze
the existence of two different discharge regimes and the transition between them. The …

We present results from a two-dimensional (2D) numerical fluid model of rf discharges in
conditions close to recently published measurements of the spatial distribution of plasma …