Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

Microelectromechanical systems (MEMS) are a fast‐growing field in microelectronics. MEMS
are commonly used as actuators and sensors with a wide variety of applications in health …

Over the last few years, considerable effort has gone into the study of the failure
mechanisms and reliability of micro-electromechanical systems (MEMS). Although still very …

It is challenging at best to find a resource that provides the breadth of information necessary
to develop a successful micro electro mechanical system (MEMS) design. Micro Electro …

When subjected to alternating stresses, most materials degrade, eg, suffer premature failure,
due to a phenomenon known as fatigue. It is generally accepted that in brittle materials, such …

The microstructure of polysilicon specimens of varying size was examined and tensile tests
were conducted to determine if the measured modulus and strength depend on the size of …

To evaluate the long-term durability properties of materials for microelectromechanical
systems (MEMS), the stress-life (S/N) cyclic fatigue behavior of a 2-μm thick polycrystalline …

Although MEMS technologies and device structures have made significant progress in the
past three decades and have found widespread application in many areas, including Micro …

The promise of MEMS for aerospace applications has been germinating for years, and
current advances bring the field to the very cusp of fruition. Reliability is chief among the …

The silicon age that led the computer revolution has significantly changed the world. The
next 30 years will see the incorporation of new types of functionality onto the chip-structures …