Silicon quantum dots (Si QDs) with unique properties of light, electricity, magnetism, and
heat possess the advantages of non-toxicity, environmental protection, and serving as …

Since the standard photolithographic patterning technology possesses a number of
sustainable issues, a “maskless” technology, Enface, has been proposed. Here, a patterned …

Applications of low-temperature plasmas for nanofabrication is a very new and quickly
emerging area at the frontier of physics and chemistry of plasmas and gas discharges …

The control of the growth of silicon dioxide (SiO 2) and the formation of quantum dots (QDs)
play an important role in the fabrication of single-electron transistors (SETs). In this work …

The tunnel barriers generation and the quantum dot size shrinkage play a significant role in
single-electron transistor (SET) fabrication. Because the numerically etch indicators were not …