Plasma processing and treatment of 2D transition metal dichalcogenides: tuning properties and defect engineering

S Sovizi, S Angizi, SA Ahmad Alem, R Goodarzi… - Chemical …, 2023 - ACS Publications
Two-dimensional transition metal dichalcogenides (TMDs) offer fascinating opportunities for
fundamental nanoscale science and various technological applications. They are a …

Low temperature atomic layer deposition of zirconium oxide for inkjet printed transistor applications

MU Jewel, MDS Mahmud, MA Monne, A Zakhidov… - RSC …, 2019 - pubs.rsc.org
We report the growth of zirconium oxide (ZrO2) as a high-k gate dielectric for an inkjet-
printed transistor using a low-temperature atomic layer deposition (ALD) from tetrakis …