An emerging era: conformable ultrasound electronics

L Zhang, W Du, JH Kim, CC Yu… - Advanced …, 2024 - Wiley Online Library
Conformable electronics are regarded as the next generation of personal healthcare
monitoring and remote diagnosis devices. In recent years, piezoelectric‐based conformable …

A review of the recent applications of aluminum nitride-based piezoelectric devices

ST Haider, MA Shah, DG Lee, S Hur - Ieee Access, 2023 - ieeexplore.ieee.org
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

E Ledesma, I Zamora, J Yanez, A Uranga… - Microsystems & …, 2022 - nature.com
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …

Piezoelectric micromachined ultrasonic transducers (PMUTs): performance metrics, advancements, and applications

Y Birjis, S Swaminathan, H Nazemi, GCA Raj… - Sensors, 2022 - mdpi.com
With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …

Pmuts arrays for structural health monitoring of bolted-joints

OMO Abdalla, G Massimino, F Quaglia, M Passoni… - Micromachines, 2023 - mdpi.com
Micro-electro-mechanical systems (MEMS) have enabled new techniques for the
miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In …

9.5% scandium doped ALN PMUT compatible with pre-processed CMOS substrates

E Ledesma, I Zamora, A Uranga… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
This paper presents an 80 μm squared piezoelectric micromachined ultrasonic transducer
(PMUT) using 9.5% scandium-doped aluminum nitride (AlScN). The improvement in the …

Phased array based on AlScN Piezoelectric Micromachined Ultrasound Transducers monolithically integrated on CMOS

I Zamora, E Ledesma, A Uranga… - IEEE Electron Device …, 2022 - ieeexplore.ieee.org
In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …

SonicFFT: A system architecture for ultrasonic-based FFT acceleration

DA Patel, VP Bui, KTC Chai, A Lal… - 2022 27th Asia and …, 2022 - ieeexplore.ieee.org
Fast Fourier Transform (FFT) is an essential algorithm for numerous scientific and
engineering applications. It is key to implement FFT in a high-performance and energy …

Eye-tracking monitoring based on PMUT arrays

S Sun, J Wang, M Zhang, Y Yuan… - Journal of …, 2021 - ieeexplore.ieee.org
As common and natural activity of human beings, eye movement has been regarded as an
indicator of human physiological and psychological health; eye movement tracking has …

Enhancing AlN PMUTs' acoustic responsivity within a MEMS-on-CMOS process

E Ledesma, I Zamora, A Uranga, F Torres, N Barniol - Sensors, 2021 - mdpi.com
In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound
transducers (PMUTs) monolithically integrated over a CMOS technology are developed …