Microelectromechanical systems (MEMS) for biomedical applications

C Chircov, AM Grumezescu - Micromachines, 2022 - mdpi.com
The significant advancements within the electronics miniaturization field have shifted the
scientific interest towards a new class of precision devices, namely microelectromechanical …

Si-based MEMS resonant sensor: A review from microfabrication perspective

G Verma, K Mondal, A Gupta - Microelectronics Journal, 2021 - Elsevier
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

A review on the size-dependent models of micro-beam and micro-plate based on the modified couple stress theory

S Kong - Archives of Computational Methods in Engineering, 2022 - Springer
Micro scale experiments demonstrated that the material deformation behaviors of some
metals and polymers deformed elasticity are size dependence, and the modified couple …

A simple macro-scale artificial lateral line sensor for the detection of shed vortices

E Scott, S Hauert - Bioinspiration & Biomimetics, 2022 - iopscience.iop.org
Underwater robot sensing is challenging due to the complex and noisy nature of the
environment. The lateral line system in fish allows them to robustly sense their surroundings …

Bayesian sensor calibration

M Berger, C Schott, O Paul - IEEE Sensors Journal, 2022 - ieeexplore.ieee.org
The calibration of multisensor systems can cause significant costs in terms of time and
resources, in particular when cross-sensitivities to parasitic influences are to be …

Bayesian sensor calibration of a CMOS-integrated Hall sensor against thermomechanical cross-sensitivities

M Berger, C Schott, O Paul - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
For the first time, Bayesian sensor calibration is used to identify efficient calibration
procedures for a sensor cross-sensitive to two parasitic influences. The object under study is …

Experimental investigation of damages in the bimorph piezoelectric energy harvester with multilayer composite substrate

A Jamshiddoust, M Avarzamani… - Mechanical Systems and …, 2023 - Elsevier
Composite materials, regarding their lightweight, can be considered a suitable option for the
next generation of piezoelectric energy harvesters, which are used for supporting low-power …

What MEMS research and development can learn from a production environment

MF Niekiel, JM Meyer, H Lewitz, A Kittmann, MA Nowak… - Sensors, 2023 - mdpi.com
The intricate interdependency of device design and fabrication process complicates the
development of microelectromechanical systems (MEMS). Commercial pressure has …

On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems

RP Dahl-Hansen, F Tyholdt, J Gjessing… - Journal of …, 2020 - ieeexplore.ieee.org
Lifetime and reliability in realistic operating conditions are important parameters for the
application of thin-film piezoelectric microelectromechanical systems (piezoMEMS) based …

Dry Test Methods for Micropumps

E Chappel - Applied Sciences, 2022 - mdpi.com
Featured Application This work describes the design for testability and the industrialized
functional test methods of an insulin micropump for type 1 diabetes care. Abstract The test in …