To suppress photoresist residues on carbon nanotubes (CNTs) resulting from
photolithography, CNTs are covered by a sacrificial layer during photolithography. Using …

After two decades of extensive investigation into the unique properties of carbon nanotubes
(CNTs), the focus is now shifting toward the utilization of CNTs in real applications. Of …

This study demonstrates the patterning and growth of carbon nanotubes (CNTs) on a highly
structured three-dimensional (3D) substrate surface and even underneath the suspended …

Understanding of the electrostatic properties of carbon nanotube (CNT) forests is essential
to enable their integration in microelectronic and micromechanical devices. In this study, we …

Since the discovery of C60 in 1985 and the paper on “Helical microtubules of graphitic
carbon” in 1991, research into carbon nanotechnology has undergone a tremendous boom …

Bottom‐up assembly by dielectrophoresis (DEP) has emerged in recent years as a viable
alternative to conventional top–down fabrication of electronic devices from nanomaterials …

Purpose–The purpose of this paper is to provide a review of recent developments in
nanoelectronic devices, with an emphasis on the materials and fabrication technologies …

This study reports a simple approach to implement a flexible CNTs tactile sensor to enable
the detecting of normal and shear forces. The merits of the presented tactile sensors are as …

A flexible, highly-sensitive, and easily fabricated carbon nanotubes (CNTs) tactile sensor is
reported in this paper. CNTs are grown and patterned on bulk-micromachined silicon …

Experimental exploration of strained nanostructures, such as nanowires and bio-molecules,
is essential for understanding their properties. However, the ability to apply and to quantify …