Plasma-activated silicon–glass high-strength multistep bonding for low-temperature vacuum packaging
M Yu, L Zhao, Y Wang, Y Xia, Y Ma, Y Wang… - Chemical Engineering …, 2023 - Elsevier
Si-glass bonding is one of the most crucial vacuum packaging methods in semiconductor
devices; however, high temperatures (> 300° C) are required to achieve a high bonding …
devices; however, high temperatures (> 300° C) are required to achieve a high bonding …
[PDF][PDF] 真空玻璃技术现状与发展趋势
邹贇涵, 奚小波, 张翼夫, 张琦, 张剑峰… - 真空科学与技术学报, 2022 - cjvst.cvs.org.cn
摘要真空玻璃是优质的透光保温材料, 具有传热性低, 隔声性能好, 抗结露能力强, 寿命长等特点,
可广泛应用于建筑, 设施农业, 冷柜, 机车, 船舶等领域. 本文通过查阅总结大量文献 …
可广泛应用于建筑, 设施农业, 冷柜, 机车, 船舶等领域. 本文通过查阅总结大量文献 …
Low-temperature direct bonding of Si and quartz glass using the APTES modification
Low-temperature direct bonding is an attractive technique for joining mirror polished
dissimilar materials with large mismatch in the coefficient of thermal expansion or/and lattice …
dissimilar materials with large mismatch in the coefficient of thermal expansion or/and lattice …
Research on the interfacial microstructure and mechanical properties of glass/Mg joint prepared by anodic bonding and vacuum diffusion bonding
Z Chou, L Hu, X Cheng, W Mu, W Jia, R Zhao… - Journal of Manufacturing …, 2024 - Elsevier
The joining of glass and Mg by a combination of anodic bonding and vacuum diffusion
bonding with Al as the interlayer was achieved in one step. The microstructures of glass/Mg …
bonding with Al as the interlayer was achieved in one step. The microstructures of glass/Mg …
Simulation and reliability testing of leadless package high-temperature pressure sensor
Z Jin, J Tian, X Tang, J Li - Microelectronics Journal, 2022 - Elsevier
Most of the current SOI high-temperature pressure sensors are packaged in lead bonding,
where the gold wire is in direct contact with the bonding bump and filled with silicone oil as a …
where the gold wire is in direct contact with the bonding bump and filled with silicone oil as a …
In-situ high-precision surface topographic and Raman mapping by divided-aperture differential confocal Raman microscopy
R Zhang, H Wu, Y Su, L Qiu, H Ni, KM Xu… - Applied Surface Science, 2021 - Elsevier
Confocal Raman microscopy (CRM) is extensively employed in several fields owing to
providing molecular fingerprint information without destroying and labelling samples. Most …
providing molecular fingerprint information without destroying and labelling samples. Most …
Dynamics of Plasma‐Assisted Epitaxial Silicon Growth Driven by a Hydrogen‐Incorporated Nanostructure for Novel Applications
Plasma‐assisted epitaxially grown silicon (plasma‐epi Si) is a new silicon‐based material
with a tailorable nanostructure. Nanovoids can be introduced into plasma‐epi Si during …
with a tailorable nanostructure. Nanovoids can be introduced into plasma‐epi Si during …
Laser soldering of stainless steel and glass assisted with copper coating
H Ren, C Tian, H Shen - Optics & Laser Technology, 2024 - Elsevier
The research on laser welding of glass and metal mainly focuses on ultrashort pulse laser or
nanosecond laser, since continuous wave (CW) laser cannot be directly applied to the …
nanosecond laser, since continuous wave (CW) laser cannot be directly applied to the …
Study on the mechanism of glass-SiC-glass anodic bonding process
X Cheng, L Hu, W Liu, Z Chou, W Jia… - … of Micromechanics and …, 2024 - iopscience.iop.org
The connection of silicon carbide (SiC) to glass is important for the development of
microelectromechanical systems. In the study, glass-SiC-glass with SiC as common anode …
microelectromechanical systems. In the study, glass-SiC-glass with SiC as common anode …
Synthesis and characterization of electrolyte substrate materials based on hyperbranched polyurethane elastomers for anodic bonding
W Zhang, M Wang, H Zhao, X Liu, R Liu… - Journal of Applied …, 2021 - Wiley Online Library
A series of hyperbranched polyurethane elastomers (PEO‐HBPUEs) as polymer electrolyte
substrate materials was developed for anodic bonding with aluminum (Al) foil in micro …
substrate materials was developed for anodic bonding with aluminum (Al) foil in micro …