Review on the modeling of electrostatic MEMS

WC Chuang, HL Lee, PZ Chang, YC Hu - Sensors, 2010 - mdpi.com
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

Design and optimisation of microelectromechanical systems: a review of the state-of-the-art

E Benkhelifa, M Farnsworth, A Tiwari… - … Journal of Design …, 2010 - inderscienceonline.com
This article provides an inclusive review on the field of design and optimisation (DO) of
microelectromechanical systems (MEMS) since its emergence, about two decades ago …

Design automation for microfluidics-based biochips

K Chakrabarty, J Zeng - ACM Journal on Emerging Technologies in …, 2005 - dl.acm.org
Advances in microfluidics technology offer exciting possibilities in the realm of enzymatic
analysis, DNA analysis, proteomic analysis involving proteins and peptides, immunoassays …

Structured design of integrated MEMS

GK Fedder - Technical Digest. IEEE International MEMS 99 …, 1999 - ieeexplore.ieee.org
MEMS design methodologies in wide use today do not support hierarchical representations
suitable for verification-based iterative design. Adoption of a structured design methodology …

[图书][B] Mechatronic systems: modelling and simulation with HDLs

G Pelz - 2003 - books.google.com
Covers the modelling and simulation of mechatronic and micromechatronic systems using
HDLs. Provides an overview of the design of digital and analog circuitry and software for …

[PDF][PDF] Top-down design of MEMS

GK Fedder - 2000 International Conference on Modeling and …, 2000 - Citeseer
ABSTRACT A top-down design flow for suspended MEMS is described, starting with
schematic capture of a design topology, followed by behavioral simulation, layout …

Addressing the needs of complex MEMS design

JV Clark, D Bindel, W Kao, E Zhu, A Kuo… - … Digest. MEMS 2002 …, 2002 - ieeexplore.ieee.org
In this paper, we report several advances in the Sugar2. 0 MEMS system simulation
package, including reduced-order modeling techniques, simple hierarchical description of …

Hierarchical mixed-domain circuit simulation, synthesis and extraction methodology for MEMS

T Mukherjee, GK Fedder - Journal of VLSI signal processing systems for …, 1999 - Springer
Emerging results for mixed-domain circuit simulation, a component-level synthesis strategy,
and a layout extractor is presented for use in design of microelectromechanical systems …

Automated optimal synthesis of microaccelerometers

T Mukherjee, Y Zhou, GK Fedder - Technical Digest. IEEE …, 1999 - ieeexplore.ieee.org
The rapid layout synthesis of a lateral accelerometer from high-level functional specifications
and design constraints is demonstrated. Functional parameters such as sensitivity, minimum …

[PDF][PDF] Layout synthesis of accelerometers

Y Zhou - Master of Science Project Report, 1998 - research.ece.cmu.edu
Automatic layout generation of a surface-micromachined accelerometer from user-supplied
specifications is presented. An accelerometer is an inertial sensor used to measure …