Terahertz waves, which lie in the frequency range of 0.1-10 THz, have long been
investigated in a few limited fields, such as astronomy, because of a lack of devices for their …

This paper demonstrates a two-layer SU8 photoresist micromachining technology that has
similar performance to conventionally machined metal. The technology is demonstrated in …

Micromachined packaging is emerging as the best choice for development of terahertz
multipixel heterodyne array instruments and other advanced terahertz systems. Traditional …

In this letter, several bandpass filters operating in the WR-1.5 band (500 to 750 GHz) are
presented. The deep reactive ion etching (DRIE) silicon micromachining process is used for …

It is difficult to package and interconnect components and devices at millimeter-waves (mm-
waves) due to excessive losses experiences at these frequencies using traditional …

This paper presents a multi-phase sub-harmonic injection locking technique. This technique
can significantly increase the locking range of a multi-phase injection locking oscillator …

A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed,
fabricated, using SU8 photoresist technology, tested and presented. The filter is composed …

This work reports on an integrated frequency quadrupler operating at 160 GHz with
maximum efficiency of 30% and corresponding output power of 70 mW. The quadrupler …

A low-sidelobe air-filled slot array is proposed and fabricated using silicon micromachining
technology for millimeter-wave application. As is well known, the high-permittivity silicon …

This article presents a 135-150-GHz Schottky diode-based bias-less frequency tripler based
on SU-8 micromachined WR-5 waveguides. The waveguides consist of five 432-μm-thick …