Crossing frequency method applicable to intermediate pressure plasma diagnostics using the cutoff probe

S Kim, J Lee, Y Lee, C Cho, S You - Sensors, 2022 - mdpi.com
Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …

Effect of time-varying plasma sheath on hypersonic vehicle-borne radar target detection

L Song, X Li, Y Liu - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
Hypersonic vehicle-borne radar target detection will suffer from time-varying plasma sheath
which is formed during hypersonic flight. In this study, effect of time-varying plasma sheath …

Flat cutoff probe for real-time electron density measurement in industrial plasma processing

HJ Yeom, JH Kim, DH Choi, ES Choi… - Plasma Sources …, 2020 - iopscience.iop.org
The microwave cutoff probe (CP) is an accurate diagnostic technique to measure absolute
electron density even in processing gas plasmas. Because this technique needs the …

A transmission line model of the cutoff probe

SJ Kim, JJ Lee, DW Kim, JH Kim… - Plasma Sources Science …, 2019 - iopscience.iop.org
The previously proposed circuit model has proven to be a powerful tool to analyze and
improve the characteristics of the cutoff probe. This model revealed the mechanism of …

Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe

SJ Kim, JJ Lee, YS Lee, DW Kim… - Plasma Sources Science …, 2020 - iopscience.iop.org
The cutoff probe (CP), which precisely measures electron density from a microwave
transmission (S 21) spectrum, has been successfully developed through physical models …

High-speed plasma measurements with a plasma impedance probe

JW Brooks, EM Tejero, MC Palliwoda… - Review of Scientific …, 2023 - pubs.aip.org
Plasma impedance probes (PIPs) are a type of RF probe that primarily measures electron
density. This work introduces two advancements: a streamlined analytical model for …

Development of the measurement of lateral electron density (MOLE) probe applicable to low-pressure plasma diagnostics

S Kim, S Lee, Y You, Y Lee, I Seong, C Cho, J Lee… - Sensors, 2022 - mdpi.com
As the importance of measuring electron density has become more significant in the material
fabrication industry, various related plasma monitoring tools have been introduced. In this …

Comments on plasma diagnostics with microwave probes

V Godyak - Physics of Plasmas, 2017 - pubs.aip.org
Analysis of recent publications on microwave probe diagnostics shows that some
assumptions used in microwave probe models are unrealistic and ambiguous, which puts …

Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density …

SJ Kim, MS Choi, SH Lee, WN Jeong, YS Lee… - Sensors, 2023 - mdpi.com
The importance of monitoring the electron density uniformity of plasma has attracted
significant attention in material processing, with the goal of improving production yield. This …

Computational characterization of microwave planar cutoff probes for non-invasive electron density measurement in low-temperature plasma: Ring-and bar-type cutoff …

SJ Kim, JJ Lee, YS Lee, HJ Yeom, HC Lee, JH Kim… - Applied Sciences, 2020 - mdpi.com
The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure
the cutoff frequency in a transmission (S21) spectrum. For real-time electron density …