Crossing frequency method applicable to intermediate pressure plasma diagnostics using the cutoff probe
S Kim, J Lee, Y Lee, C Cho, S You - Sensors, 2022 - mdpi.com
Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …
Effect of time-varying plasma sheath on hypersonic vehicle-borne radar target detection
L Song, X Li, Y Liu - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
Hypersonic vehicle-borne radar target detection will suffer from time-varying plasma sheath
which is formed during hypersonic flight. In this study, effect of time-varying plasma sheath …
which is formed during hypersonic flight. In this study, effect of time-varying plasma sheath …
Flat cutoff probe for real-time electron density measurement in industrial plasma processing
The microwave cutoff probe (CP) is an accurate diagnostic technique to measure absolute
electron density even in processing gas plasmas. Because this technique needs the …
electron density even in processing gas plasmas. Because this technique needs the …
A transmission line model of the cutoff probe
The previously proposed circuit model has proven to be a powerful tool to analyze and
improve the characteristics of the cutoff probe. This model revealed the mechanism of …
improve the characteristics of the cutoff probe. This model revealed the mechanism of …
Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe
SJ Kim, JJ Lee, YS Lee, DW Kim… - Plasma Sources Science …, 2020 - iopscience.iop.org
The cutoff probe (CP), which precisely measures electron density from a microwave
transmission (S 21) spectrum, has been successfully developed through physical models …
transmission (S 21) spectrum, has been successfully developed through physical models …
High-speed plasma measurements with a plasma impedance probe
JW Brooks, EM Tejero, MC Palliwoda… - Review of Scientific …, 2023 - pubs.aip.org
Plasma impedance probes (PIPs) are a type of RF probe that primarily measures electron
density. This work introduces two advancements: a streamlined analytical model for …
density. This work introduces two advancements: a streamlined analytical model for …
Development of the measurement of lateral electron density (MOLE) probe applicable to low-pressure plasma diagnostics
S Kim, S Lee, Y You, Y Lee, I Seong, C Cho, J Lee… - Sensors, 2022 - mdpi.com
As the importance of measuring electron density has become more significant in the material
fabrication industry, various related plasma monitoring tools have been introduced. In this …
fabrication industry, various related plasma monitoring tools have been introduced. In this …
Comments on plasma diagnostics with microwave probes
V Godyak - Physics of Plasmas, 2017 - pubs.aip.org
Analysis of recent publications on microwave probe diagnostics shows that some
assumptions used in microwave probe models are unrealistic and ambiguous, which puts …
assumptions used in microwave probe models are unrealistic and ambiguous, which puts …
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density …
SJ Kim, MS Choi, SH Lee, WN Jeong, YS Lee… - Sensors, 2023 - mdpi.com
The importance of monitoring the electron density uniformity of plasma has attracted
significant attention in material processing, with the goal of improving production yield. This …
significant attention in material processing, with the goal of improving production yield. This …
Computational characterization of microwave planar cutoff probes for non-invasive electron density measurement in low-temperature plasma: Ring-and bar-type cutoff …
The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure
the cutoff frequency in a transmission (S21) spectrum. For real-time electron density …
the cutoff frequency in a transmission (S21) spectrum. For real-time electron density …