A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance

R Potekin, S Kim, DM McFarland, LA Bergman… - Nonlinear …, 2018 - Springer
We propose a mass sensing scheme in which amplitude shifts within a nonlinear ultra-wide
broadband resonance serve as indicators for mass detection. To achieve the broad …

Experimental and theoretical investigation of the 2: 1 internal resonance in the higher-order modes of a MEMS microbeam at elevated excitations

L Ruzziconi, N Jaber, L Kosuru, ML Bellaredj… - Journal of Sound and …, 2021 - Elsevier
We analyze the dynamics induced by a 2: 1 internal resonance between the third (second
symmetric) and the fifth (third symmetric) mode of a MEMS microbeam. An extensive …

Identification of an experimental nonlinear energy sink device using the unscented Kalman filter

A Lund, SJ Dyke, W Song, I Bilionis - Mechanical Systems and Signal …, 2020 - Elsevier
Nonlinear energy sink (NES) devices have recently been introduced as a means of passive
structural control and have been shown to effectively dissipate energy from structural …

Nonlinear dynamics of resonant microelectromechanical system (MEMS): A review

G Chakraborty, N Jani - Mechanical Sciences: The Way Forward, 2021 - Springer
Nonlinearity plays an important role in the dynamics of microelectromechanical resonator.
On the one hand, presence of nonlinearity may lead to poor performance of the device. On …

Self-calibration and performance control of MEMS with applications for IoT

J Clark - Sensors, 2018 - mdpi.com
A systemic problem for microelectromechanical systems (MEMS) has been the large gap
between their predicted and actual performances. Due to process variations, no two MEMS …

Detection of cyclic-fold bifurcation in electrostatic MEMS transducers by motion-induced current

S Park, M Khater, D Effa… - Journal of …, 2017 - iopscience.iop.org
This paper presents a new detection method of cyclic-fold bifurcations in electrostatic MEMS
transducers based on a variant of the harmonic detection of resonance method. The …

Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback

E Higuchi, H Yabuno, Y Yamamoto… - Journal of …, 2022 - iopscience.iop.org
It is well known that the micro scale deviations of mechanical properties of a sample can be
detected by measurement methods that use microcantilever as resonators. Those methods …

Characterizing the spatially dependent sensitivity of resonant mass sensors using inkjet deposition

N Bajaj, JF Rhoads, GTC Chiu - Journal of …, 2017 - asmedigitalcollection.asme.org
Micro-and millimeter-scale resonant mass sensors have received widespread attention due
to their robust and sensitive performance in a wide range of detection applications. A key …

Ultrabroadband microresonators with geometrically nonlinear stiffness and dissipation

R Potekin, K Asadi, S Kim, LA Bergman, AF Vakakis… - Physical Review …, 2020 - APS
In the areas of micro-and nanoresonant sensing, energy harvesting, and signal processing,
the ability to provide resonance over a broad frequency bandwidth is a persistent goal. One …

Electrical control of effective mass, damping, and stiffness of MEMS devices

JV Clark, O Misiats, S Sayed - IEEE Sensors Journal, 2016 - ieeexplore.ieee.org
We propose the use of electrostatic force feedback to control the effective mass, damping, or
stiffness of micro electro mechanical system (MEMS). Our analysis suggests that if feedback …