A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance
R Potekin, S Kim, DM McFarland, LA Bergman… - Nonlinear …, 2018 - Springer
We propose a mass sensing scheme in which amplitude shifts within a nonlinear ultra-wide
broadband resonance serve as indicators for mass detection. To achieve the broad …
broadband resonance serve as indicators for mass detection. To achieve the broad …
Experimental and theoretical investigation of the 2: 1 internal resonance in the higher-order modes of a MEMS microbeam at elevated excitations
We analyze the dynamics induced by a 2: 1 internal resonance between the third (second
symmetric) and the fifth (third symmetric) mode of a MEMS microbeam. An extensive …
symmetric) and the fifth (third symmetric) mode of a MEMS microbeam. An extensive …
Identification of an experimental nonlinear energy sink device using the unscented Kalman filter
Nonlinear energy sink (NES) devices have recently been introduced as a means of passive
structural control and have been shown to effectively dissipate energy from structural …
structural control and have been shown to effectively dissipate energy from structural …
Nonlinear dynamics of resonant microelectromechanical system (MEMS): A review
G Chakraborty, N Jani - Mechanical Sciences: The Way Forward, 2021 - Springer
Nonlinearity plays an important role in the dynamics of microelectromechanical resonator.
On the one hand, presence of nonlinearity may lead to poor performance of the device. On …
On the one hand, presence of nonlinearity may lead to poor performance of the device. On …
Self-calibration and performance control of MEMS with applications for IoT
J Clark - Sensors, 2018 - mdpi.com
A systemic problem for microelectromechanical systems (MEMS) has been the large gap
between their predicted and actual performances. Due to process variations, no two MEMS …
between their predicted and actual performances. Due to process variations, no two MEMS …
Detection of cyclic-fold bifurcation in electrostatic MEMS transducers by motion-induced current
This paper presents a new detection method of cyclic-fold bifurcations in electrostatic MEMS
transducers based on a variant of the harmonic detection of resonance method. The …
transducers based on a variant of the harmonic detection of resonance method. The …
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback
E Higuchi, H Yabuno, Y Yamamoto… - Journal of …, 2022 - iopscience.iop.org
It is well known that the micro scale deviations of mechanical properties of a sample can be
detected by measurement methods that use microcantilever as resonators. Those methods …
detected by measurement methods that use microcantilever as resonators. Those methods …
Characterizing the spatially dependent sensitivity of resonant mass sensors using inkjet deposition
Micro-and millimeter-scale resonant mass sensors have received widespread attention due
to their robust and sensitive performance in a wide range of detection applications. A key …
to their robust and sensitive performance in a wide range of detection applications. A key …
Ultrabroadband microresonators with geometrically nonlinear stiffness and dissipation
In the areas of micro-and nanoresonant sensing, energy harvesting, and signal processing,
the ability to provide resonance over a broad frequency bandwidth is a persistent goal. One …
the ability to provide resonance over a broad frequency bandwidth is a persistent goal. One …
Electrical control of effective mass, damping, and stiffness of MEMS devices
We propose the use of electrostatic force feedback to control the effective mass, damping, or
stiffness of micro electro mechanical system (MEMS). Our analysis suggests that if feedback …
stiffness of micro electro mechanical system (MEMS). Our analysis suggests that if feedback …