A review on laser drilling and cutting of silicon

HJ Wang, T Yang - Journal of the European Ceramic Society, 2021 - Elsevier
Silicon is the most widely used material in numerous fields. Traditional mechanical
machining methods have been unable to meet the higher requirements of processing …

Epitaxial growth of ZnO films

R Triboulet, J Perriere - Progress in Crystal Growth and Characterization of …, 2003 - Elsevier
After summing up the main physical properties of ZnO and its subsequent applications the
aim of this article is to review the growth of ZnO epitaxial films by PLD, MBE, MOCVD and …

Plasma evolution during metal ablation with ultrashort laser pulses

J König, S Nolte, A Tünnermann - Optics Express, 2005 - opg.optica.org
We report on time-resolved measurements of the plasma evolution during metal ablation
with ultrashort laser pulses in the range from 200 fs to 3.3 ps. The plasma transmission …

Micromachining of silicon by short-pulse laser ablation in air and under water

KL Choo, Y Ogawa, G Kanbargi, V Otra, LM Raff… - Materials Science and …, 2004 - Elsevier
Micromachining of silicon was conducted using a short-pulse (FWHM= 25ns) KrF (λ=
248nm) excimer laser that generates laser energy in the range of 100–480mJ. Laser …

Modelling of ultrashort laser ablation of gold films in vacuum

JK Chen, JE Beraun - Journal of Optics A: Pure and Applied …, 2003 - iopscience.iop.org
Based on the concept of phase explosion, an enthalpy form of the two-step heating
equations is proposed to model the superheating and material ablation of metals caused by …

Laser drilling in silicon carbide and silicon carbide matrix composites

DR Sun, G Wang, Y Li, Y Yu, C Shen, Y Wang - Optics & Laser …, 2024 - Elsevier
Silicon carbide (SiC) presents excellent semiconductor and physicochemical properties. The
fabrication of through-holes in SiC and SiC matrix composites is beneficial to the new …

Micro-machining of silicon wafer in air and under water

LM Wee, EYK Ng, AH Prathama, H Zheng - Optics & Laser Technology, 2011 - Elsevier
Laser ablation micro-machining tests are conducted on silicon wafer, both in air and under
flowing water stream, with the use of 355nm-X AVIA laser. Effects of laser pulse frequency …

Parametric studies on pulsed near ultraviolet frequency tripled Nd: YAG laser micromachining of sapphire and silicon

TC Chen, RB Darling - Journal of materials processing technology, 2005 - Elsevier
The use of a near ultraviolet Nd: YAG laser for rapid micromachining of sapphire and silicon
has been systematically investigated. Cutting, marking and surface ablation of both …

Polarization-dependent femtosecond laser ablation of poly-methyl methacrylate

JM Guay, A Villafranca, F Baset, K Popov… - New Journal of …, 2012 - iopscience.iop.org
We show that ablation features in poly-methyl methacrylate (PMMA) induced by a single
femtosecond laser pulse are imposed by light polarization. The ablation craters are …

Solvent‐Assisted Laser Drilling of Silicon Carbide

LM Wee, LE Khoong, CW Tan… - International Journal of …, 2011 - Wiley Online Library
Laser drilling of single crystalline silicon carbide (SiC) wafer in air, under water, and under
methanol with a 355 nm wavelength laser is investigated and compared. Among these …