[图书][B] Metalorganic vapor phase epitaxy (MOVPE): Growth, materials properties, and applications

S Irvine, P Capper - 2019 - books.google.com
Systematically discusses the growth method, material properties, and applications for key
semiconductor materials MOVPE is a chemical vapor deposition technique that produces …

InGaAs FinFETs directly integrated on silicon by selective growth in oxide cavities

C Convertino, C Zota, H Schmid, D Caimi, M Sousa… - Materials, 2018 - mdpi.com
III-V semiconductors are being considered as promising candidates to replace silicon
channel for low-power logic and RF applications in advanced technology nodes. InGaAs is …

InGaAs FinFETs 3-D sequentially integrated on FDSOI Si CMOS with record performance

C Convertino, CB Zota, D Caimi… - IEEE Journal of the …, 2019 - ieeexplore.ieee.org
In this paper, we demonstrate InGaAs FinFETs 3-D sequentially (3DS) integrated on top of a
fully depleted silicon-on-insulator CMOS. Top layer III-V FETs are fabricated using a Si …

In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment

QH Luc, KS Yang, JW Lin, CC Chang… - IEEE Electron …, 2018 - ieeexplore.ieee.org
This letter presents a remote NH 3/N 2 plasma treatment after gate oxide deposition for
improving the electrical characteristics and the reliability of In 0.53 Ga 0.47 As FinFET. The …

Nitrogen-Passivated (010) In0.53Ga0.47As FinFETs With High Peak gm and Reduced Leakage Current

HL Ko, QH Luc, P Huang, SM Chen… - … on Electron Devices, 2021 - ieeexplore.ieee.org
In this article, InGaAs FinFETs using (010) orientation channel and nitrogen post remote
plasma (RP) treatment have been fabricated. This device exhibits a peak transconductance …

A new technique for mobility extraction in MOSFETs in the presence of prominent gate oxide trapping: Application to InGaAs MOSFETs

X Cai, A Vardi, J Grajal… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
In the presence of prominent gate oxide trapping, the conventional technique for channel
mobility extraction in MOSFETs based on IV/CV measurements becomes inadequate. This is …

Demonstration of 3-D SRAM cell by 3-D monolithic integration of InGaAs n-FinFETs on FDSOI CMOS with interlayer contacts

V Deshpande, H Hahn, E O'Connor… - … on Electron Devices, 2017 - ieeexplore.ieee.org
In this paper, we demonstrate, for the first time, 3-D Monolithic integration of short-channel
replacement metal gate InGaAs n-FinFETs on fully-depleted silicon-on-insulator CMOS, with …

Static and low frequency noise characterization of InGaAs MOSFETs and FinFETs on insulator

TA Karatsori, K Bennamane… - 2018 48th European …, 2018 - ieeexplore.ieee.org
A detailed static and low frequency noise characterization of InGaAs/OI MOSFETs has been
performed. The mobility in long channel devices is very good for such 20nm thin film III-Vvv …

A 3-D potential model to assess DC characteristics of Si FinFETs

UF Ahmed, MM Ahmed - Journal of Computational Electronics, 2019 - Springer
The potential distribution inside the channel of a Si FinFET is usually determined by a 2-D
Poisson equation which does not truly describe its variation. Due to the 3-D structure of a …

High-performance InGaAs FinFETs with raised source/drain extensions

C Convertino, CB Zota, D Caimi, M Sousa… - Japanese Journal of …, 2019 - iopscience.iop.org
In this letter we report on high-performance InGaAs FinFETs with optimized on-off trade-off.
The InGaAs FinFETs are fabricated on silicon substrate using a CMOS-compatible …