Electrophysical properties of Al/nanocrystalline CeOx/Si/Al structures
NV Maksimchuk, LN Korolevych… - 2015 IEEE 35th …, 2015 - ieeexplore.ieee.org
Nanocrystalline CeO x film in the Al/nc-CeO x/Si-Al structures has been obtained using flash
evaporation method and method of metallic Ce oxidation. The electrophysical properties of …
evaporation method and method of metallic Ce oxidation. The electrophysical properties of …