Development of high uniformity Al1-xScxN piezoelectric film stack dry etching process on 8-inch silicon wafers
J Yan, Y Zhou, S Zhang - Vacuum, 2023 - Elsevier
This paper have investigated the basic properties of inductively coupled plasma reactive ion
etching (ICP-RIE) of scandium doped aluminum nitride (Al 1-x Sc x N) thin films on 8-inch …
etching (ICP-RIE) of scandium doped aluminum nitride (Al 1-x Sc x N) thin films on 8-inch …
Study on a eco-friendly and efficient method for growing aluminum nitride whiskers
L Xie, H Zhang, X Xie, E Wang, Z Cheng, G Liu, L Bian… - Vacuum, 2023 - Elsevier
As the III-V semiconductor with the highest band gap, aluminum nitride (AlN) has broad
application prospects in the deep ultraviolet (UVC) field. AlN have unparalleled advantages …
application prospects in the deep ultraviolet (UVC) field. AlN have unparalleled advantages …
Demonstration of Integrated AlScN Photonic Devices on 8-inch Silicon Substrate
Z Li, K Bian, X Chen, X Zhao, Y Qiu… - Journal of Lightwave …, 2024 - ieeexplore.ieee.org
In combination with higher piezoelectric effect and larger optical second-order susceptibility
(χ (2)) compared with aluminum nitride (AlN), scandium-doped aluminum nitride (AlScN) …
(χ (2)) compared with aluminum nitride (AlN), scandium-doped aluminum nitride (AlScN) …
Piezoelectric based MEMS acoustic sensor for wide frequency applications
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
Numerical Simulation of Rapid Nitriding of Aluminum via Pulsed Laser
JX Wang, SY Li, X Ran, Y Cheng… - Industrial & Engineering …, 2023 - ACS Publications
To better understand the mechanisms of pulsed laser-assisted synthesis of metal nitride, a
numerical model was proposed to simulate the process of laser nitriding of aluminum. The …
numerical model was proposed to simulate the process of laser nitriding of aluminum. The …
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique
WR Ali, M Prasad - Microelectronic Engineering, 2022 - Elsevier
This paper reports a new technique for fabrication of diaphragm and microchannel in a
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …
single step for the development of a piezoelectric MEMS acoustic sensor. It describes the …
Aluminum nitride nanoparticles with high purity prepared via urea glass route under different sintering conditions
Y Xiangyang, P Wenjing, Z Shufeng, L Wei… - Materials Chemistry and …, 2022 - Elsevier
Aluminum nitride (AlN) ceramic is widely used in lots of fields, but its high-efficiency
preparation still needs to be developed. In this paper, AlN nanoparticles are prepared from …
preparation still needs to be developed. In this paper, AlN nanoparticles are prepared from …
Design and fabrication of piezoelectric MEMS sensor for acoustic measurements
WR Ali, M Prasad - Silicon, 2022 - Springer
This study illustrates the design, modeling and fabrication of a piezoelectric acoustic sensor
based on ZnO to be utilized for aeroacoustic measurements. In aeroacoustics, measurement …
based on ZnO to be utilized for aeroacoustic measurements. In aeroacoustics, measurement …
[HTML][HTML] Development and applications of aluminum nitride thin film technology
CLA Cunha, TC Pimenta, MA Fraga - Thin Films-Deposition …, 2022 - intechopen.com
Aluminum nitride (AlN) thin films have aroused the interest of researchers due to their
unique physicochemical properties. However, further studies on these semiconductor …
unique physicochemical properties. However, further studies on these semiconductor …
A mass sensor based on an aluminum nitride MEMS oscillator for gas sensing applications
This research presents a mass sensor based on a piezoelectric thin-film MEMS oscillator
with high mass resolution, real-time detection, and extremely linear behavior for gas …
with high mass resolution, real-time detection, and extremely linear behavior for gas …