High aspect ratio (HAR) silicon etch is reviewed, including commonly used terms, history,
main applications, different technological methods, critical challenges, and main theories of …

Over the past four decades, the field of silicon piezoresistive pressure sensors has
undergone a major revolution in terms of design methodology and fabrication processes …

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a
comprehensive guide to MEMS materials, technologies, and manufacturing with a particular …

Because of the low dimensional power of its force scaling law, surface tension is appropriate
for carrying out reshaping and assembly in the microstructure size domain. This paper …

Mid‐infrared materials antireflection is in high demand for high‐powered or ultra‐broadband
coherent light sources, where conventional antireflection coatings cannot be reliably …

This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …

The search for alternatives to the standard methods of preventing bacterial adhesion and
biofilm formation on biotic and abiotic surfaces alike has led to the use of biomimetics to …

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

Separation of complex gaseous mixtures using gas chromatography (GC) is an important
process in analytical systems for environmental monitoring, medical diagnosis, and forensic …

Silicon (Si) microfabrication techniques, derived from the microelectronics industry, have
enabled the development and commercialization of microelectromechanical systems …