Progress of optomechanical micro/nano sensors: a review
Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …
resonances has attracted huge interest in sensor applications due to its small footprint, high …
Silicon photonic phase shifters and their applications: A review
With the development of silicon photonics, dense photonic integrated circuits play a
significant role in applications such as light detection and ranging systems, photonic …
significant role in applications such as light detection and ranging systems, photonic …
MEMS-enabled on-chip computational mid-infrared spectrometer using silicon photonics
On-chip spectrometers using silicon photonics offer a compact, energy-efficient, and cost-
effective solution to biochemical spectroscopy and hyperspectral imaging in integrated and …
effective solution to biochemical spectroscopy and hyperspectral imaging in integrated and …
Heterogeneous wafer bonding technology and thin-film transfer technology-enabling platform for the next generation applications beyond 5G
Wafer bonding technology is one of the most effective methods for high-quality thin-film
transfer onto different substrates combined with ion implantation processes, laser irradiation …
transfer onto different substrates combined with ion implantation processes, laser irradiation …
Recent progress in silicon‐based photonic integrated circuits and emerging applications
In recent years, with the further ministration of the semiconductor device in integrated
circuits, power consumption and data transmission bandwidth have become insurmountable …
circuits, power consumption and data transmission bandwidth have become insurmountable …
Mid‐infrared silicon‐on‐lithium‐niobate electro‐optic modulators toward integrated spectroscopic sensing systems
Mid‐infrared spectroscopy is an emerging technique in various applications such as
molecule identification and label‐free chemical sensing. Integrated photonic platforms have …
molecule identification and label‐free chemical sensing. Integrated photonic platforms have …
Subwavelength on‐chip light focusing with bigradient all‐dielectric metamaterials for dense photonic integration
Photonic integrated circuits (PICs) provide a promising platform for miniaturized on‐chip
optical systems for communication, computation, and sensing applications. The dense …
optical systems for communication, computation, and sensing applications. The dense …
Development of triboelectric-enabled tunable Fabry-Pérot photonic-crystal-slab filter towards wearable mid-infrared computational spectrometer
Miniaturized optical spectrometers have been realized by exploiting conventional working
principles and advanced nanofabrication technology. Especially in the mid-infrared (MIR) …
principles and advanced nanofabrication technology. Especially in the mid-infrared (MIR) …
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
Abstract Long-wave infrared (LWIR, 6–14 µm) is an important wavelength range as it covers
abundant vibrational molecular fingerprints that can be used for gas/liquid sensing and …
abundant vibrational molecular fingerprints that can be used for gas/liquid sensing and …
Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits
Alignment is critical for efficient integration of photonic integrated circuits (PICs), and
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …