Progress of optomechanical micro/nano sensors: a review

X Liu, W Liu, Z Ren, Y Ma, B Dong… - International Journal of …, 2021 - Taylor & Francis
Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …

Silicon photonic phase shifters and their applications: A review

H Sun, Q Qiao, Q Guan, G Zhou - Micromachines, 2022 - mdpi.com
With the development of silicon photonics, dense photonic integrated circuits play a
significant role in applications such as light detection and ranging systems, photonic …

MEMS-enabled on-chip computational mid-infrared spectrometer using silicon photonics

Q Qiao, X Liu, Z Ren, B Dong, J Xia, H Sun, C Lee… - Acs …, 2022 - ACS Publications
On-chip spectrometers using silicon photonics offer a compact, energy-efficient, and cost-
effective solution to biochemical spectroscopy and hyperspectral imaging in integrated and …

Heterogeneous wafer bonding technology and thin-film transfer technology-enabling platform for the next generation applications beyond 5G

Z Ren, J Xu, X Le, C Lee - Micromachines, 2021 - mdpi.com
Wafer bonding technology is one of the most effective methods for high-quality thin-film
transfer onto different substrates combined with ion implantation processes, laser irradiation …

Recent progress in silicon‐based photonic integrated circuits and emerging applications

Z Xiao, W Liu, S Xu, J Zhou, Z Ren… - Advanced Optical …, 2023 - Wiley Online Library
In recent years, with the further ministration of the semiconductor device in integrated
circuits, power consumption and data transmission bandwidth have become insurmountable …

Mid‐infrared silicon‐on‐lithium‐niobate electro‐optic modulators toward integrated spectroscopic sensing systems

S Xu, Z Ren, B Dong, J Zhou, W Liu… - Advanced Optical …, 2023 - Wiley Online Library
Mid‐infrared spectroscopy is an emerging technique in various applications such as
molecule identification and label‐free chemical sensing. Integrated photonic platforms have …

Subwavelength on‐chip light focusing with bigradient all‐dielectric metamaterials for dense photonic integration

Z Ren, B Dong, Q Qiao, X Liu, J Liu, G Zhou, C Lee - InfoMat, 2022 - Wiley Online Library
Photonic integrated circuits (PICs) provide a promising platform for miniaturized on‐chip
optical systems for communication, computation, and sensing applications. The dense …

Development of triboelectric-enabled tunable Fabry-Pérot photonic-crystal-slab filter towards wearable mid-infrared computational spectrometer

Y Chang, S Xu, B Dong, J Wei, X Le, Y Ma, G Zhou… - Nano Energy, 2021 - Elsevier
Miniaturized optical spectrometers have been realized by exploiting conventional working
principles and advanced nanofabrication technology. Especially in the mid-infrared (MIR) …

MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications

X Liu, Q Qiao, B Dong, W Liu, C Xu, S Xu… - International Journal of …, 2022 - Taylor & Francis
Abstract Long-wave infrared (LWIR, 6–14 µm) is an important wavelength range as it covers
abundant vibrational molecular fingerprints that can be used for gas/liquid sensing and …

Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits

AAS Rabih, S Sharma, J Pita, M Ménard, F Nabki - Optics Express, 2023 - opg.optica.org
Alignment is critical for efficient integration of photonic integrated circuits (PICs), and
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …