Cantilever-like micromechanical sensors

A Boisen, S Dohn, SS Keller, S Schmid… - Reports on Progress in …, 2011 - iopscience.iop.org
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems

P Abgrall, V Conedera, H Camon, AM Gue… - …, 2007 - Wiley Online Library
Since its introduction in the nineties, the negative resist SU‐8 has been increasingly used in
micro‐and nanotechnologies. SU‐8 has made the fabrication of high‐aspect ratio structures …

Static and dynamic analysis of micro beams based on strain gradient elasticity theory

S Kong, S Zhou, Z Nie, K Wang - International Journal of Engineering …, 2009 - Elsevier
The static and dynamic problems of Bernoulli–Euler beams are solved analytically on the
basis of strain gradient elasticity theory due to Lam et al. The governing equations of …

Polymeric 3D printed functional microcantilevers for biosensing applications

S Stassi, E Fantino, R Calmo… - … applied materials & …, 2017 - ACS Publications
In this study, we show for the first time the production of mass-sensitive polymeric biosensors
by 3D printing technology with intrinsic functionalities. We also demonstrate the feasibility of …

[图书][B] Handbook of nanophysics: nanomedicine and nanorobotics

KD Sattler - 2010 - taylorfrancis.com
The tools of nanodiagnostics, nanotherapy, and nanorobotics are expected to revolutionize
the future of medicine, leading to presymptomatic diagnosis of disease, highly effective …

Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

S Keller, D Haefliger, A Boisen - Journal of Micromechanics and …, 2010 - iopscience.iop.org
SU-8 cantilevers with a thickness of 2 µm were fabricated using a dry release method and
two steps of SU-8 photolithography. The processing of the thin SU-8 film defining the …

Vibrations of non-uniform functionally graded MWCNTs-polystyrene nanocomposite beams under action of moving load

M Heshmati, MH Yas - Materials & Design (1980-2015), 2013 - Elsevier
Free and forced vibrations of non-uniform functionally graded multi-walled carbon
nanotubes (MWCNTs)-polystyrene nanocomposite beams are investigated via Timoshenko …

Fabrication and testing of polymer cantilevers for VOC sensors

N Shiraishi, T Ikehara, DV Dao, S Sugiyama… - Sensors and Actuators A …, 2013 - Elsevier
We investigated the size and mode dependencies of the resonance frequencies and quality
factors of PMMA (polymethyl methacrylate) and PC (polycarbonate) cantilevers under …

Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films

P Abgrall, S Charlot, R Fulcrand, L Paul… - Microsystem …, 2008 - Springer
Free-standing microstructures such as cantilevers, membranes or microchannels are
building blocks of microfluidic systems and MEMS. As a complement to silicon, the large …

Magnetic field sensors based on microelectromechanical systems (MEMS) technology

MT Todaro, L Sileo, M De Vittorio - Magnetic Sensors-Principles …, 2012 - books.google.com
In the last decades magnetic field sensors have been developed and realized for analyzing
and controlling thousands of functions (Ripka, 2001), and they have become a widespread …