Analysis of the dynamic behavior of a V-shaped electrothermal microactuator
H Chen, X Wang, J Wang, Z Xi - Journal of Micromechanics and …, 2020 - iopscience.iop.org
This paper presents an accurate and complete analysis of the dynamic performance of a V-
shaped microactuator. This multi-physical coupling analysis is split into two steps: the electro …
shaped microactuator. This multi-physical coupling analysis is split into two steps: the electro …
Low Temperature sensor based on optimized Z-shaped beam actuator
M Tecpoyotl-Torres… - 2022 International …, 2022 - ieeexplore.ieee.org
This work focuses on the performance of a modified Z-Shaped chevron actuator, thermally
actuated, based on an arrangement of 8 pairs of beams anchored at their outer ends. The …
actuated, based on an arrangement of 8 pairs of beams anchored at their outer ends. The …
Micropinza basada en un arreglo de actuadores chevrón para la manipulación de microalambres
DM Martinez Rodriguez - 2023 - riaa.uaem.mx
En la tecnología MEMS existen diversos dispositivos micrométricos que integran elementos
mecánicos, eléctricos, electrónicos, ópticos, entre otros, las cuales se utilizan en diversos …
mecánicos, eléctricos, electrónicos, ópticos, entre otros, las cuales se utilizan en diversos …
[PDF][PDF] DESIGN, MODELING AND SIMULATION OF THERMAL MICROACTUATORS
E MORARU, M SELAGEA - scientificbulletin.upb.ro
This paper presents a study of MEMS microactuators with different configurations (U, V and
Z). The technological process for these structures was described. The polysilicon thermal …
Z). The technological process for these structures was described. The polysilicon thermal …