Compared to other methods, we present the benefits of the Continuous Cellular Automaton
(CCA) to describe in a simple and flexible manner anisotropic wet chemical etching of GaN …

Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz
resonators are applied to sensors and serve as sensitive elements. The capability of deep …

Flexible printed circuit boards (FPCB) are widely used in smart devices with high wiring
density and light weight. In this paper, the chemical etching process of FPCB with 18 μm line …

The quartz-crystal resonator is the core device for frequency control in modern
communication systems and network technology. At present, in modern resonator blanks …

In this paper, the simple, rejection-based kinetic Monte Carlo simulation method is applied
for the approximate simulation of the etch rates and three-dimensional etch structures during …

In this paper, a model of etch rates of crystallographic planes of sapphire based on step flow
mechanism is proposed, which explains the relationship between etch rates of and atomic …

The Ga-face gallium nitride (GaN) crystal has recently attracted significant research interest
in the micro/nano device due to its exceptional properties. Therefore, exploring low-cost and …

We present a continuum modeling approach to simulate anisotropic wet etching of single-
crystal sapphire employing mixtures of sulfuric acid and phosphoric acid. Wet etching of …

This paper presents a quartz wet etching simulation procedure tailored for
microelectromechanical systems (MEMS) fabrication. It utilizes geometric methods and is …

In this paper, the Monte Carlo simulation for sapphire in wet etching is optimized, which
improves the accuracy and efficiency of simulated results. Firstly, an eight-index …