VoxCap, a fast Fourier transform (FFT)-accelerated and Tucker-enhanced integral equation
simulator for capacitance extraction of voxelized structures, is proposed. The VoxCap solves …

An impedance extractor, called VoxImp, is proposed to compute the impedances of the
structures discretized by voxels. VoxImp iteratively solves the volume-surface integral …

Recent stunning developments in three-dimensional (3-D) printing technology have allowed
the designers to produce their circuit boards and components at the convenience of their …

General approach to the design of MEMS process flow and mask layout relies on purely
experience and prior knowledge of the similar devices. It is a quite challenging and hard …

An ongoing problem facing all companies is how to continuously satisfy customers.
Customer satisfaction has been generally determined to be an indicator utilized by …

This paper introduces an integrated 3-D simulation and visualization environment for
Micro/Nano fabrication processes. From the nanostructures in several hundred nanometers …

Abstract Micro-Electro–Mechanical System (MEMS) is the integration of mechanical
elements, sensors, actuators, and electronics on a common silicon substrate through micro …

Deep reactive ion etching (DRIE) technique is a new and powerful tool in Micro-Electro-
Mechanical Systems (MEMS) fabrication. A 3D DRIE simulation can help researcher …

Virtual lithography system based on volume rendering is put forward. This system supports
the input of masking pattern in BMP format and includes integrated diffraction and standing …