MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Recent research has led to a deeper understanding of the nature and consequences of
interactions of materials on an atomic scale. The results have resonated throughout the field …

'Artificial'actuator technologies under development include shape memory alloys,
piezoelectric actuators, magnetostrictive actuators, contractile polymers and electrostatic …

Gas microflows are encountered in many applications of Micro-Electro-Mechanical Systems
(MEMS). Computational modeling and simulation can provide an effective predictive …

We describe the design, fabrication and operation of several micromotors that have been
produced using integrated-circuit processing. Both rotors and stators for these motors, which …

The development of rotary nanomotors is crucial for advancing nanoelectromechanical
system technology. In this work, we report design, assembly and rotation of ordered arrays of …

Spur-of-the-moment planetary exploration missions are within our reach. Complex systems
and complex missions usually take years of planning and force launches to become …

This paper presents the theory, simulation results, and experimental study of the levitating
force (normal to the substrate) associated with Interdigitated capacitor (electro static comb) …

Micromachines, particularly surface micromachines, often include smooth and chemically
active surfaces. Because the kinetic energies, start-up forces and torques involved in their …

Micromachining technology opens up many new opportunities for optical and optoelectronic
systems. It offers unprecedented capabilities in extending the functionality of optical devices …