Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the
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The distributed quantum network, in which nodes comprising small but well-controlled
quantum states are entangled via photonic channels, has in recent years emerged as a …

The effect of Inductively-Coupled Plasma (ICP) etching on diamond using chlorine-based
plasma has been investigated. The diamond materials studied include type IIa natural …

We demonstrate for the first time the feasibility of all-diamond integrated optic devices over
large areas using a combination of photolithography, reactive ion etching (RIE) and focused …

High quality, ultra-thin single crystal diamond (SCD) membranes that have a thickness in the
sub-micron range are of extreme importance as a materials platform for photonics, quantum …

Laser fabrication of micrometer-scale graphitic structures in the bulk of monocrystalline CVD
diamond was investigated. Ultra-short (1ps) pulses of Ti: sapphire laser were tightly focused …

Waveguide structures were fabricated in both nanocrystalline CVD diamond (NCD) and
HPHT type 1b single crystal diamond using photolithography and reactive ion etching. The …

2D photonic crystals formed inside monocrystalline diamond to operate in the IR spectral
range are reported. The photonic structures consisting of 150-μm-long graphitized wires …

Due to its extraordinary properties diamond can be used as mold in a hot embossing
process which allows the replication of micro-optical structures. For this application a low …

CVD diamond coated tungsten carbide tools have been used for cutting and drilling of soft
materials such as aluminum and copper alloys. However, it is very difficult to obtain a tool …