Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …

The previously proposed circuit model has proven to be a powerful tool to analyze and
improve the characteristics of the cutoff probe. This model revealed the mechanism of …

The cutoff probe (CP), which precisely measures electron density from a microwave
transmission (S 21) spectrum, has been successfully developed through physical models …

As the importance of measuring electron density has become more significant in the material
fabrication industry, various related plasma monitoring tools have been introduced. In this …

Analysis of recent publications on microwave probe diagnostics shows that some
assumptions used in microwave probe models are unrealistic and ambiguous, which puts …

The cutoff probe (CP) is a precise diagnostic technique that measures electron density using
two cylindrical probe tips and holders inserted in a low-pressure plasma. However, a recent …

The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure
the cutoff frequency in a transmission (S21) spectrum. For real-time electron density …

A new plasma diagnostic tool called the planar cutoff probe (PCP), recently developed by
Kim et al.[Plasma Sources Sci. Technol. 28, 015004 (2019)], can be embedded into a …

Stable plasma ignition of remote plasma sources (RPSs) for various plasma processes is
essential to ensure the stability of the discharge, steady operating conditions, and high …

A non-invasive method of determining the collision frequency ν m by measuring the net
plasma impendence in a magnetized, capacitive-coupled, radio-frequency (rf) discharge …