Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement
KS Rao, W Samyuktha, DV Vardhan, BG Naidu… - Microsystem …, 2020 - Springer
This paper presents the design and simulation of a MEMS based clamped capacitive
pressure sensor for blood pressure measurement. Normally, Blood pressure for human …
pressure sensor for blood pressure measurement. Normally, Blood pressure for human …
Study of a novel capacitive pressure sensor using spiral comb electrodes
W Chen, Q Yang, Q Liu, Y Zhang, L He… - Measurement …, 2024 - iopscience.iop.org
For traditional capacitive pressure sensors, high nonlinearity and poor sensitivity greatly
limited their sensing applications. Hence, an innovative design of capacitors based on spiral …
limited their sensing applications. Hence, an innovative design of capacitors based on spiral …
Performance analysis and simulation of mems capacitive pressure sensor
MEMS capacitive pressure sensor has a wide application due to its less power dependency
and less sensitive to temperature changes. It also has good over-pressure tolerance. This …
and less sensitive to temperature changes. It also has good over-pressure tolerance. This …
[PDF][PDF] Analysis and enhancement of capacitive pressure sensor's sensitivity through material engineering processes
abstract Micro Electro Mechanical System (MEMS) based Piezoresistive Pressure Sensing
techniques are widely adopted in many pressure measurement applications. Bio-medical …
techniques are widely adopted in many pressure measurement applications. Bio-medical …
Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications
In this paper, mathematical modeling and simulation of a MEMS-based clamped square-
shape membrane for capacitive pressure sensors have been performed. Three types of …
shape membrane for capacitive pressure sensors have been performed. Three types of …
Investigation of the enhancement of microelectromechanical capacitive pressure sensor performance using the genetic algorithm optimization technique
MMYB Elshabasy, MA Al-Moghazy… - Engineering …, 2021 - Taylor & Francis
The electrical nonlinearity in microelectromechanical system (MEMS) capacitive pressure
sensors is highly related to the geometry of the movable parts of these capacitors …
sensors is highly related to the geometry of the movable parts of these capacitors …
[PDF][PDF] Dynamic modelling and analysis of MEMS-based low-pressure range capacitive sensors for biomedical applications
D Bhatia - … .s3.ap-south-1.amazonaws.com
Sensitivity and linearity are promising parameters for MEMS (Microelectromechanical
system) based Capacitive pressure sensors (CPS). This study discusses the basic principle …
system) based Capacitive pressure sensors (CPS). This study discusses the basic principle …
MEMS Based Novel Micro-Cantilever Designs for Bio Sensing Application: Cantilever based Bio sensor
R Hajare - SPAST Abstracts, 2021 - spast.org
Biosensor is an analytical device that converts the biological responses into electrical
signals. The growing demands of the medical industry necessitate for a biosensor which is …
signals. The growing demands of the medical industry necessitate for a biosensor which is …
[引用][C] Design and Implementation of Pressure Sensors for Various Applications
SS Baviskar, B Pramanick - 2021 - Indian Institute of Technology Goa