Giant self-polarization in FeRAM element based on sol-gel PZT films
LA Delimova, EV Guschina, VS Yuferev… - MRS Online …, 2015 - cambridge.org
Integrated ferroelectric capacitors Pt/PZT/Pt/Ti/SiO2/Si with sol-gel deposited PZT films are
studied. The (111) textured polycrystalline films are shown to have nonconductive PZT grain …
studied. The (111) textured polycrystalline films are shown to have nonconductive PZT grain …