Stress in thin films and coatings: Current status, challenges, and prospects

G Abadias, E Chason, J Keckes… - Journal of Vacuum …, 2018 - pubs.aip.org
The issue of stress in thin films and functional coatings is a persistent problem in materials
science and technology that has congregated many efforts, both from experimental and …

[HTML][HTML] Conductive nitrides: Growth principles, optical and electronic properties, and their perspectives in photonics and plasmonics

P Patsalas, N Kalfagiannis, S Kassavetis… - Materials Science and …, 2018 - Elsevier
The nitrides of most of the group IVb-Vb-VIb transition metals (TiN, ZrN, HfN, VN, NbN, TaN,
MoN, WN) constitute the unique category of conductive ceramics. Having substantial …

Enhancement of calcium copper titanium oxide photoelectrochemical performance using boron nitride nanosheets

S Kawrani, AA Nada, MF Bekheet, M Boulos… - Chemical Engineering …, 2020 - Elsevier
Photoelectrochemical water splitting under visible light has attracted attention for renewable
hydrogen production. Despite prevalent investigations, many challenges still hindered an …

[HTML][HTML] A kinetic model for stress generation in thin films grown from energetic vapor fluxes

E Chason, M Karlson, JJ Colin, D Magnfält… - Journal of Applied …, 2016 - pubs.aip.org
We have developed a kinetic model for residual stress generation in thin films grown from
energetic vapor fluxes, encountered, eg, during sputter deposition. The new analytical …

Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin films

F Cemin, G Abadias, T Minea, C Furgeaud, F Brisset… - Acta Materialia, 2017 - Elsevier
We have studied the development of intrinsic stress and microstructure of copper (Cu) films
deposited under energetic ion bombardment. Stress evolution during growth of∼ 150 nm …

In-situ monitoring of stress evolution in high power impulse magnetron sputtering-deposited Ti-Al-N films: Effect of substrate bias and temperature

PRT Avila, O Zabeida, LB Varela… - Thin Solid Films, 2023 - Elsevier
The origin of residual stress during film deposition is a topic of strong interest in the coating
engineering community; it requires appropriate investigation tools to explain the different …

[HTML][HTML] Role of magnetic field and bias configuration on hipims deposition of w films

D Vavassori, F Mirani, F Gatti, D Dellasega… - Surface and Coatings …, 2023 - Elsevier
In this work, the deposition of tungsten (W) films by High Power Impulse Magnetron
Sputtering (HiPIMS) has been investigated. By adopting a combined modeling and …

Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films

R Graillot-Vuillecot, AL Thomann, T Lecas… - Vacuum, 2020 - Elsevier
Titanium-based thin films are synthesized by the magnetron sputtering of a titanium target in
pure argon or in a mixture of argon and oxygen (reactive regime) in three experimental …

Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling

Z Rao, T Su, T Koenig, GB Thompson, D Depla… - Surface and Coatings …, 2022 - Elsevier
Stress evolution during reactive DC magnetron sputtering deposition in TiN, ZrN and TaN
films at different growth rates, pressures and relative gas flow rates was measured by a …

Mechanisms of stress generation in thin films and coatings

AR Shugurov, AV Panin - Technical Physics, 2020 - Springer
Abstract Analysis of the literature data on the reasons for the development of mechanical
stresses in epitaxial, polycrystalline, and amorphous films during their formation and under …