Potassium tartrate as a complexing agent for chemical mechanical polishing of Cu/Co/TaN barrier liner stack in H2O2 based alkaline slurries
L Hu, G Pan, C Li, X Zhang, J Liu, P He… - Materials Science in …, 2020 - Elsevier
The chemical mechanical polishing (CMP) of Cu/Co/TaN barrier liner stack of the sub-14nm
devices was associated with several challenges, one of which was to screen out the desired …
devices was associated with several challenges, one of which was to screen out the desired …
Multi-objective optimization of tungsten CMP slurry for advanced semiconductor manufacturing using a response surface methodology
In this study, a response surface methodology (RSM) coupled with a face center cube
design (FCD) was used to optimize the three principal components (ie, Fe (NO 3) 3, H 2 O 2 …
design (FCD) was used to optimize the three principal components (ie, Fe (NO 3) 3, H 2 O 2 …
A solution framework for response surface-based multiple quality characteristics optimization
S Bera, I Mukherjee - International Journal of Reliability, Quality and …, 2018 - World Scientific
A common problem generally encountered during manufacturing process improvement
involves simultaneous optimization of multiple 'quality characteristics' or so-called …
involves simultaneous optimization of multiple 'quality characteristics' or so-called …
Optimizing mean and variance of multiresponse in a multistage manufacturing process using operational data
A multistage process consists of sequential stages where each stage is affected by its
preceding stage, and it in turn affects the stage that follows. The process described in this …
preceding stage, and it in turn affects the stage that follows. The process described in this …
Generating evenly distributed nondominated solutions in dual response surface optimization
The dual response surface optimization (DRSO) approach attempts to simultaneously
optimize the mean and standard deviation of a response variable. In DRSO, the mean and …
optimize the mean and standard deviation of a response variable. In DRSO, the mean and …
A pairwise comparison-based interactive procedure for the process capability approach to multiple-response surface optimization
Multiple-response surface optimization (MRSO) aims to find a setting of the input variables
that simultaneously optimizes the multiple responses. The process capability approach …
that simultaneously optimizes the multiple responses. The process capability approach …
Dual Response Surface Optimization using Multiple Objective Genetic Algorithms
DH Lee, BR Kim, JK Yang, SH Oh - Journal of Korean Institute of …, 2017 - koreascience.kr
Dual response surface optimization (DRSO) attempts to optimize mean and variability of a
process response variable using a response surface methodology. In general, mean and …
process response variable using a response surface methodology. In general, mean and …
OPTIMIZING MULTIPLE RESPONSE VARIABLES OF CHEMICAL AND MECHANICAL PLANARIZATION PROCESS FOR SEMICONDUCTOR FABRICATION USING …
Semiconductors are fabricated through unit processes including photolithography, etching,
diffusion, ion implantation, deposition, and planarization processes. Chemical mechanical …
diffusion, ion implantation, deposition, and planarization processes. Chemical mechanical …