Fabrication and characterization of thin-film silicon resonators on 10 m-thick polyimide substrates
TG Pestana, RMR Pinto, RA Dias… - Journal of …, 2020 - iopscience.iop.org
MEMS fabricated on polymer substrates can allow for a range of new applications that
require bending or lightweight, unbreakable substrates. The surface micromachining of …
require bending or lightweight, unbreakable substrates. The surface micromachining of …