Review of additive electrochemical micro-manufacturing technology

X Li, P Ming, S Ao, W Wang - International Journal of Machine Tools and …, 2022 - Elsevier
Additive electrochemical micro-manufacturing (micro-AECM) is a nontraditional fabrication
method which fundamentally employs electrochemical deposition (ECD) mechanism in …

[HTML][HTML] Lab-on-a-chip devices: How to close and plug the lab?

Y Temiz, RD Lovchik, GV Kaigala… - Microelectronic …, 2015 - Elsevier
Abstract Lab-on-a-chip (LOC) devices are broadly used for research in the life sciences and
diagnostics and represent a very fast moving field. LOC devices are designed, prototyped …

Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips

P Vulto, N Glade, L Altomare, J Bablet, L Del Tin… - Lab on a Chip, 2005 - pubs.rsc.org
Microfluidic networks are patterned in a dry film resist (Ordyl SY300/550) that is sandwiched
in between two substrates. The technique enables fabrication of complex biochips with …

The future of magnetic sensors

RS Popovic, JA Flanagan, PA Besse - Sensors and actuators A: Physical, 1996 - Elsevier
The operation of magnetic-field sensors is based on many different physical principles
ranging from induction to magneto-optical effects. This in turn leads to a vast range of …

Low-loss gap waveguide transmission line and transitions at 220–320 GHz using dry film micromachining

S Farjana, M Ghaderi, AU Zaman… - IEEE Transactions …, 2021 - ieeexplore.ieee.org
This article presents a novel microfabrication technique to manufacture gap waveguide
(GW) components operating at submillimeter-wave (sub-mmWave) frequency range. The …

Fast prototyping using a dry film photoresist: microfabrication of soft-lithography masters for microfluidic structures

K Stephan, P Pittet, L Renaud… - Journal of …, 2007 - iopscience.iop.org
Etertec HQ-6100 dry film photoresist was used in this work to fabricate soft-lithography
masters applied to microfluidic applications. We demonstrated that the use of this photoresist …

Sacrificial layer process with laser-driven release for batch assembly operations

AS Holmes, SM Saidam - Journal of Microelectromechanical …, 1998 - ieeexplore.ieee.org
A dry sacrificial layer process is presented in which microstructures fabricated on UV-
transparent substrates are released by excimer laser ablation of a polymer sacrificial …

Buried microchannels in photopolymer for delivering of solutions to neurons in a network

MO Heuschkel, L Guerin, B Buisson, D Bertrand… - Sensors and Actuators B …, 1998 - Elsevier
A simple and efficient technique for the fabrication of buried microfluidic channels is
presented. Microchannels made using a contribution of thick liquid and laminated …

Electroplating moulds using dry film thick negative photoresist

E Kukharenka, MM Farooqui, L Grigore… - Journal of …, 2003 - iopscience.iop.org
This paper reports on progress on the feasibility of fabricating moulds for electroplating
using Ordyl P-50100 (negative) acrylate polymer based dry film photoresist, commercially …

Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching

L Zhang, W Wang, XJ Ju, R Xie, Z Liu, LY Chu - RSC Advances, 2015 - pubs.rsc.org
A simple, cheap and rapid method is developed to fabricate glass-based microfluidic
devices with dry film photoresists (DFR) as pattern transfer masks for wet etching. In this …