RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
Surface-acoustic-wave devices based on lithium niobate and amorphous silicon thin films on a silicon substrate
This work presents an acoustic platform using solidly mounted thin-oriented lithium niobate
(LiNbO3) film on silicon (Si). A thin layer of amorphous Si eliminates a conductive layer …
(LiNbO3) film on silicon (Si). A thin layer of amorphous Si eliminates a conductive layer …
Wideband surface acoustic wave filter at 3.7 GHz with spurious mode mitigation
R Su, S Fu, J Shen, Z Lu, H Xu, R Wang… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
As an essential functional block in radio frequency (RF) front-ends, surface acoustic wave
(SAW) filters with large fractional bandwidth (FBW), high center frequency (), and low loss …
(SAW) filters with large fractional bandwidth (FBW), high center frequency (), and low loss …
High-Performance Acoustic Wave Devices on LiTaO3/SiC Hetero-Substrates
We present high-performance shear horizontal surface acoustic wave (SH-SAW) and
longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on …
longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on …
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
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High-performance SH-SAW resonator using optimized 30° YX-LiNbO3/SiO2/Si
With the rapid development of 5G technology, acoustic wave filters with large bandwidths
are urgently required to deal with the explosive increase in data traffic. Recently, there is …
are urgently required to deal with the explosive increase in data traffic. Recently, there is …
Advanced Surface Acoustic Wave Resonators on LiTaO₃/SiO₂/Sapphire Substrate
The shear horizontal surface acoustic wave (SH-SAW) resonators with excellent quality
factor and temperature stability were fabricated on 42° YX-LiTaO3/SiO2/sapphire substrate …
factor and temperature stability were fabricated on 42° YX-LiTaO3/SiO2/sapphire substrate …
Tilted IDT Designs for Spurious Modes Suppression in LiNbO/SiO/Si SAW Resonators
High-performance wideband acoustic filters are urgently needed for communication systems
with large volumes of data. Recently, multilayered surface acoustic wave (SAW) resonators …
with large volumes of data. Recently, multilayered surface acoustic wave (SAW) resonators …
Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
S Yandrapalli, SEK Eroglu, V Plessky… - Journal of …, 2022 - ieeexplore.ieee.org
This work presents an in-depth study of simulation and measurement results of laterally
excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high …
excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high …
Gigahertz low-loss and high power handling acoustic delay lines using thin-film lithium-niobate-on-sapphire
In this work, we present the first group of gigahertz low-loss, wideband, and high power
handling delay lines (ADLs) using a thin-film lithium niobate (LiNbO 3)-on-sapphire platform …
handling delay lines (ADLs) using a thin-film lithium niobate (LiNbO 3)-on-sapphire platform …