This paper presents a systematic approach to transduction optimization of resonant piezo-
based MEMS devices. The method is based on inverse design approach using direct …

To improve the accuracy of three-dimensional (3D) surface contour measurements of
freeform optics, a two-dimensional (2D) tilt measurement sensor for confocal microscopy …

This paper presents an intentional investigation of the effect of the object tilt angle on the
tracking local minimum method (TL method), which is the one for detecting the measurement …

Spectral confocal technology utilizes the principle of dispersion to establish the precise
coding relationship between spatial position and wavelength in the axial focal point. The …

A new sensor type is proposed to accurately detect the surface profiles of three-dimensional
(3D) free-form surfaces. This sensor is based on the single-exposure, zero-crossing method …

A single-exposure microscopic profilometry using artificial neural network (ANN) was
developed for 3-D profile reconstruction of precise surface geometry. Optical profilometry is …

The article presents a new method for resolving measurement ambiguity in diffractive image
microscopy (DIM) for automated optical inspection (AOI) in advanced manufacturing. The …

为了解决传统激光差动共焦显微镜(LDCM) 无法在测距的同时, 进行高精度倾斜角度测量的问题,
提出了一种基于差动共焦的倾角测量传感器. 在对倾斜表面进行测量时, 该传感器首先利用轴向 …

A new full-field profilometry based on diffraction image correlation (DIC) was developed in
which the technique bases on calibrated database of reference diffractive images (RDIs) to …

A new optical surface measuring method based on correlation-based diffractive image
profilometry (DIP) is developed for accuracy enhancement by introducing external optical …