Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching …
R Gholamzadeh, M Gharooni, H Salarieh… - Journal of Vacuum …, 2022 - pubs.aip.org
Accelerometers that work based on intensity modulation of light are more sensitive,
economically feasible, and have a simpler fabrication process compared to wavelength …
economically feasible, and have a simpler fabrication process compared to wavelength …
Design, simulation and fabrication of a MEMS accelerometer by using sequential and pulsed-mode DRIE processes
R Gholamzadeh, K Jafari… - … of Micromechanics and …, 2016 - iopscience.iop.org
A sensitive half-bridge MEMS accelerometer fabricated by sequential and pulsed-mode
processes is presented in this paper. The proposed accelerometer is analyzed by using …
processes is presented in this paper. The proposed accelerometer is analyzed by using …
Silicon-based suspended structure fabricated by femtosecond laser direct writing and wet etching
YC Ma, L Wang, KM Guan, T Jiang… - IEEE photonics …, 2016 - ieeexplore.ieee.org
Suspended structures have attracted a great deal of attention in the field of micro-technology
and nanotechnology for their important functions. However, the fabrication of the suspended …
and nanotechnology for their important functions. However, the fabrication of the suspended …
A simultaneous deep micromachining and surface passivation method suitable for silicon-based devices
Three novel methods for simultaneous micromachining and surface passivation of silicon
are reported. A thin passivation layer is achieved using continuous and sequential plasma …
are reported. A thin passivation layer is achieved using continuous and sequential plasma …